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Polysilicon Thin-Film Transistors Based on Frequency Doubled cw-Nd: YVO₄ Laser Crystallized Silicon

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Polycrystalline Semiconductors VII

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Periodical:

Solid State Phenomena (Volume 93)

Pages:

55-60

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.93.55

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Online since:

June 2003

Authors:

A. Saboundji, J.F. Michaud, T. Mohammed-Brahim, F. Le Bihan, G. Andrä, J. Bergmann, Fritz Falk

Keywords:

Field Effect Mobility, Laser Crystallization, Polycrystalline Silicon, Thin Film Transistor

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Сopyright:

© 2003 Trans Tech Publications Ltd. All Rights Reserved

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[1] Y. Helen, R. Dassow, M. Nerding, K. Mourgues, F. Raoult, J.R. Köhler, T. Mohammed-Brahim, R. Rogel, O. Bonnaud and J. H. Werner, Thin Solid Films 383, 143 (2001)

DOI: 10.1016/s0040-6090(00)01586-8

[2] K. Mourgues, F. Raoult, L. Pichon, T. Mohammed-Brahim, D. Briand and O. Bonnaud, Mat. Res. Soc. Symp. Pro c. 471, 155 (1997)

[3] G. Andrä, J. Bergmann, S. Christiansen, F. Falk, M. Nerding, N.D. Sinh, in: Polycrystalline Semiconductors VI - Bulk materials, Thin Films, and Devices, O. Bonnaud, T. MohammedBrahim, H.P. Strunk, J.H. Werner eds. (Scitech Publ., Uettikon am See, Switzerland, 2001 p.337)

[4] Y. Helen, K. Mourgues, F. Raoult, T. Mohammed-Brahim, O. Bonnaud, R. Rogel, S. Prochasson, P. Boher, D. Zahorski., Thin Solid Films 337, 133 (1999)

DOI: 10.1016/s0040-6090(98)01377-7

[5] A. Hara, F. Takeuchi, M. Takei, K. Suga, K. Yoshino, M. Chida, Y. Sano and N. Sasaki, Dig. Tech. Papers of Conf. on Active Matrix Liquid Crystal Displays (AMLCD'02) (Japan Soc. Appl. Phys. 2002 p.227)

[6] Y. Helen, PhD thesis, University of Rennes 1, France, (2000)