Defect Control Process Technologies for High-Performance Polycrystalline Si Thin-Film Transistor Fabrication

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Periodical:

Solid State Phenomena (Volume 93)

Edited by:

T. Fuyuki, T. Sameshima, H.P. Strunk and J.H. Werner

Pages:

49-54

DOI:

10.4028/www.scientific.net/SSP.93.49

Citation:

S. Higashi et al., "Defect Control Process Technologies for High-Performance Polycrystalline Si Thin-Film Transistor Fabrication", Solid State Phenomena, Vol. 93, pp. 49-54, 2003

Online since:

June 2003

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$35.00

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