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HomeSolid State PhenomenaSolid State Phenomena Vol. 93Defect Control Process Technologies for...

Defect Control Process Technologies for High-Performance Polycrystalline Si Thin-Film Transistor Fabrication

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Polycrystalline Semiconductors VII

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Periodical:

Solid State Phenomena (Volume 93)

Pages:

49-54

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.93.49

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Online since:

June 2003

Authors:

Seiichiro Higashi, Daisuke Abe, Yasushi Hiroshima, Kazuyuki Miyashita, Takahiro Kawamura, Satoshi Inoue, Tatsuya Shimoda

Keywords:

Defect Passivation, Electron Cyclotron Resonance, Laser Annealing, Polycrystalline Silicon, Thin Film Transistor

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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