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Online since: December 2011
Authors: Guo Jun Jin, Gui Qin Li, Li Xin Lu, Yi Sun, Song Lin, You Gen Tang
The schematic diagram of the structure of the reaction chamber which is discussed in this paper is shown in Fig.1 (a).The uniform flow distribution board as the power electrode with the gas tank placed in the vacuum reaction chamber, connected with power positive, the grounded heating plate with the uniform flow distribution board constitute a reaction chamber of symmetrical electrode structure.
(a) The working principal (b) The grid model Fig.1 Schematic structure of the reaction chamber The simulation method for PECVD PECVD equipment in the process of manufacturing thin film materials, to ensure the uniformity of deposition rate is one of the key technologies, so a good understanding of the process is quite important to the structural adjustment of reaction chamber and the optimization of the process of film growth.
According to the above reaction chamber structure, using computational fluid dynamics software CFD - ACE - GEOM to build two-dimensional model, after divide grids, as shown in Fig.1 (b).
Plasma Chemistry and Plasma Processing, Vol. 7(1987), p. 267-273
(a) The working principal (b) The grid model Fig.1 Schematic structure of the reaction chamber The simulation method for PECVD PECVD equipment in the process of manufacturing thin film materials, to ensure the uniformity of deposition rate is one of the key technologies, so a good understanding of the process is quite important to the structural adjustment of reaction chamber and the optimization of the process of film growth.
According to the above reaction chamber structure, using computational fluid dynamics software CFD - ACE - GEOM to build two-dimensional model, after divide grids, as shown in Fig.1 (b).
Plasma Chemistry and Plasma Processing, Vol. 7(1987), p. 267-273
Online since: December 2012
Authors: Chuan Qi Fu, Xu He, Zhou Wang
It can be seen in Fig.1 (a) that some irregular cell structures are present on coatings with low concentrations of surfactant and PTFE.
The irregular cell structures grow smaller in size with the addition of more surfactant and PTFE to the system.
And, with addition of higher concentrations of surfactants and PTFE into the plating bath, surface of the coating become smooth and the cell structures are disappeared [Fig.1 (b)].
However, it can be seen in the Fig.1(c) that with the continuous increases in the concentrations of surfactant and PTFE of the bath, some nodular structures appear again, which leads an inhomogeneous surface for the coating.
Materials Chemistry and Physics Vol. 76(2002), p.38
The irregular cell structures grow smaller in size with the addition of more surfactant and PTFE to the system.
And, with addition of higher concentrations of surfactants and PTFE into the plating bath, surface of the coating become smooth and the cell structures are disappeared [Fig.1 (b)].
However, it can be seen in the Fig.1(c) that with the continuous increases in the concentrations of surfactant and PTFE of the bath, some nodular structures appear again, which leads an inhomogeneous surface for the coating.
Materials Chemistry and Physics Vol. 76(2002), p.38
Online since: February 2006
Authors: Nobuhiro Kawatsuki, Akira Emoto, Hiroshi Ono
Kawatsuki2,c
1
Department of Electrical Engineering, Nagaoka University of technology,
1603-1 Kamitomioka, Nagaoka, 940-2188, Japan
2
Department of Material Science and Chemistry, University of Hyogo,
2167 Shosha, Himeji 671-2201, Japan
a
emoto@stn.nagaokaut.ac.jp, bonoh@nagaokaut.ac.jp, ckawatuki@eng.u-hyogo.ac.jp
Keywords: Liquid crystal, Anisotropic grating, Multiplexed grating
Abstract.
Computer-generated holograms also allow to record complex artificial photofabrication of subwavelength structures.
Yu et al. furthermore demonstrated polarization-multiplexed form-birefringent structures by means of electric-beam (EB) lithography and etching process [3].
Typical pure polarization hologram was also achieved by the form-birefringent structures [4].
Because the molecules are aligned by their cross-linked structures, the thermal stability is enhanced up to 150 °C To prepare sample films, PPLCs in a solution of methylene chloride were spin-cast onto a quartz substrate, and 200-nm-thick film with good optical qualities was obtained.
Computer-generated holograms also allow to record complex artificial photofabrication of subwavelength structures.
Yu et al. furthermore demonstrated polarization-multiplexed form-birefringent structures by means of electric-beam (EB) lithography and etching process [3].
Typical pure polarization hologram was also achieved by the form-birefringent structures [4].
Because the molecules are aligned by their cross-linked structures, the thermal stability is enhanced up to 150 °C To prepare sample films, PPLCs in a solution of methylene chloride were spin-cast onto a quartz substrate, and 200-nm-thick film with good optical qualities was obtained.
Online since: January 2005
Authors: M. Liu, D.M. Li, X.B. Wang, J.B. Niu, F. Pan
Pan
1, b,X.B.Wang
1, b, J.B.Niu
3, c
, M.Liu
3, c
1
Laboratory of Advanced Materials, Department of Materials Science and Engineering,
Tsinghua University, Beijing 100084, PR China
2
Chemistry Department of Xinjiang University, Wulumuqi 830046, PR China
3
Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, PR China
a
ldm02@mails.tsinghua.edu.cn, bpanf@mail.tsinghua.edu.cn, cniujiebin@163.com
Keywords: Al, Zr, LiNbO3, films, texture, underlayer, resistivity
Abstract.
This layered structure promoted better mechanical strength and suppressed Al migration.
Samples were analyzed by X-ray diffraction (XRD) and scanning electron microscope (SEM) to identify the structure and surface morphology of Al films.
Consequently, the Al film shows a rugged surface due to its polycrystalline grains structure.
Annealing treatment is expected to lead to decrease structure defects and reduce the resistivity.
This layered structure promoted better mechanical strength and suppressed Al migration.
Samples were analyzed by X-ray diffraction (XRD) and scanning electron microscope (SEM) to identify the structure and surface morphology of Al films.
Consequently, the Al film shows a rugged surface due to its polycrystalline grains structure.
Annealing treatment is expected to lead to decrease structure defects and reduce the resistivity.
Online since: August 2013
Authors: Feng Gao, Qing Lin He, Hong Zhang Song, Xing Hu
Therefore, search for new oxide thermoelectric ceramics that are structure stable at high temperature is indispensable.
After regrinding, the power was pressed into bar-shape, and sintered at 1140°C in air for 20h again.X-ray diffraction (XRD, X’pert Pro system using Cu Kα radiation) analysis was carried out to check the phase structures of the samples.
It can be seen that all of them show the layered structure and that no obvious impure phase exists.
The partial substitution of Eu for Y doesn’t affect the formation of the layered hexagonal symmetry structure.
This can be understood from the defect chemistry where the resistivity of Y1-xEuxBaCo4O7+δ is related to the oxygen vacancy concentration in the ceramic.
After regrinding, the power was pressed into bar-shape, and sintered at 1140°C in air for 20h again.X-ray diffraction (XRD, X’pert Pro system using Cu Kα radiation) analysis was carried out to check the phase structures of the samples.
It can be seen that all of them show the layered structure and that no obvious impure phase exists.
The partial substitution of Eu for Y doesn’t affect the formation of the layered hexagonal symmetry structure.
This can be understood from the defect chemistry where the resistivity of Y1-xEuxBaCo4O7+δ is related to the oxygen vacancy concentration in the ceramic.
Online since: October 2014
Authors: Zhen Jun Dou, Zong Yi Qin, Tao Lin, Miao Cheng, Zhang Gen Ni
Chemical structures of cellulose nanospheres, neat polyurethane and the resulting nanocomposite films were characterized on a Fourier transform infrared (FT–IR) spectrometer (Nicolet 8700, Nicolet, USA) with a scan number of 100, the scan area from 2000 to 400 cm-1 and resolution of 4 cm-1.
Figure 1 SEM Image of Cellulose Nanospheres (left) and the Resulting Nanocomposite Films (right) Chemical Structure Figure 2 shows the FT–IR spectra of neat polyurethane, cellulose nanospheres and the resulting nanocomposite films.
For example, the region between 1195 and 975 cm-1 is associated with stretching vibrations of C–O–C groups present in the polyurethane structure, and the spectral region between 1700 and 1600 cm-1 (amide I) to absorption bands of urethane and urea carbonyl groups.
The results showed with incorporation of cellulose nanospheres there was no significant change in the structure of polyurethane.
Journal of Materials Chemistry A. 2014, 2: 251–258.
Figure 1 SEM Image of Cellulose Nanospheres (left) and the Resulting Nanocomposite Films (right) Chemical Structure Figure 2 shows the FT–IR spectra of neat polyurethane, cellulose nanospheres and the resulting nanocomposite films.
For example, the region between 1195 and 975 cm-1 is associated with stretching vibrations of C–O–C groups present in the polyurethane structure, and the spectral region between 1700 and 1600 cm-1 (amide I) to absorption bands of urethane and urea carbonyl groups.
The results showed with incorporation of cellulose nanospheres there was no significant change in the structure of polyurethane.
Journal of Materials Chemistry A. 2014, 2: 251–258.
Online since: March 2013
Authors: Rong Chen, Tao Zhou, Hua Wei Jiang, Yue Xiao, Ying Bang Yao, Bin Shan
The 1st Reactor Design
A bottom-heated single wafer ALD reactor is successfully constructed, the finite element method (FEM) simulation and deposition experiment results will be discussed in this chapter.
2.1 Reactor structure
As shown in Fig. 1a), the reactor has a gas inlet and outlet which is welded to a 1/4 inch tube made of 316L stainless steel[12] and a KF flange respectively.
The new reactor has a showerhead structure aiming to improve the uniformity of the pressure distribution, and radiation heating system to achieve better heat distribution. 3.1 Reactor structure Fig. 4 A series of parallel heating pipes to form radiation heater Instead of contact heating, the radiation heating system with heating pipes around the reaction chamber is used in this reactor as Fig. 4 shows.
Fig. 5 a) showerhead gas inlet; b) circular groove gas outlet On the other hand, the precursors are delivered vertically and the gas inlet that utilized showerhead structure with circular array pinhole distribution (Fig. 5a)) ensures the uniform gas flow distribution on the substrate.
George, Journal of Physical Chemistry A 114, 1281-1289 (2010).
The new reactor has a showerhead structure aiming to improve the uniformity of the pressure distribution, and radiation heating system to achieve better heat distribution. 3.1 Reactor structure Fig. 4 A series of parallel heating pipes to form radiation heater Instead of contact heating, the radiation heating system with heating pipes around the reaction chamber is used in this reactor as Fig. 4 shows.
Fig. 5 a) showerhead gas inlet; b) circular groove gas outlet On the other hand, the precursors are delivered vertically and the gas inlet that utilized showerhead structure with circular array pinhole distribution (Fig. 5a)) ensures the uniform gas flow distribution on the substrate.
George, Journal of Physical Chemistry A 114, 1281-1289 (2010).
Online since: March 2013
Authors: Mohamad Rusop, Mohd Zainizan Sahdan, M. Salina, N.A. Yusoff, U.M. Noor
The basic structure of FET consists of 3 main terminals named gate, drain, and source [1].
The high resolution SEM images showed that the adapted temperature from 400°C to 600°C has increase of the crystalline structure.
At deposition temperature 400°C, the growth of flower shaped ZnO structures were demonstrated.
[6] Matthias Passlack, Ravi Droopad, and Karthik Rajagopalan, High Mobility NMOSFET Structure With High-k Dielectric, IEEE Electron Device Letter 26 (10) (2005) 713-715
[9] Haoyong Yin, Zhude Xu, Qingsheng Wang, Jingyi Bai, Huahui Bao, Materials Chemistry and Physics 91 (2005) 130-133
The high resolution SEM images showed that the adapted temperature from 400°C to 600°C has increase of the crystalline structure.
At deposition temperature 400°C, the growth of flower shaped ZnO structures were demonstrated.
[6] Matthias Passlack, Ravi Droopad, and Karthik Rajagopalan, High Mobility NMOSFET Structure With High-k Dielectric, IEEE Electron Device Letter 26 (10) (2005) 713-715
[9] Haoyong Yin, Zhude Xu, Qingsheng Wang, Jingyi Bai, Huahui Bao, Materials Chemistry and Physics 91 (2005) 130-133
Online since: May 2020
Authors: Valentina Loganina, Yerkebulan B. Mazhitov
These deviations are apparently due to the interaction of the particles and the formation of a structure in which the particles of the dispersed phase are oriented relative to each other in a certain way (structuring systems).
Tarasov, Influence of an Additive of Sol of Silicon Acid on Durability of Finishing Structures on the Basis of Lime, Contemporary Engineering Sciences. 7(37) (2014) 1949-1954
Ayler, Chemistry of silica, Moscow, 1982
Mazhitov, Structure and Properties of the Modified Binding for Silicate Paints, Materials Science Forum. 931 (2018) 469-474
Tarasov, Influence of an Additive of Sol of Silicon Acid on Durability of Finishing Structures on the Basis of Lime, Contemporary Engineering Sciences. 7(37) (2014) 1949-1954
Ayler, Chemistry of silica, Moscow, 1982
Mazhitov, Structure and Properties of the Modified Binding for Silicate Paints, Materials Science Forum. 931 (2018) 469-474
Online since: May 2007
Authors: Juan Carlos Rendón-Angeles, Kazumichi Yanagisawa, Ayumu Onda, Koji Kajiyoshi, Ning Zhong Bao, Misato Kariya, Zully Matamoras-Veloza
First, a glass powder is hydrothermally treated at
low temperatures, so that water diffuses into the glass structure.
Thus, this process gives porous materials with a fine structure including closed pores at lower temperature than the ordinary method.
Water incorporated into the glass structure by hydrothermal treatments acts as a vesicant.
When a small quantity of water is added in the autoclave, the amount of water diffused into glass structure must be limited.
The plates had a fine structure with some closed pores and floated on water.
Thus, this process gives porous materials with a fine structure including closed pores at lower temperature than the ordinary method.
Water incorporated into the glass structure by hydrothermal treatments acts as a vesicant.
When a small quantity of water is added in the autoclave, the amount of water diffused into glass structure must be limited.
The plates had a fine structure with some closed pores and floated on water.