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Online since: March 2009
Authors: Tsunenobu Kimoto, Masato Noborio, Jun Suda, Yuichiro Nanen, Hironori Yoshioka
Improved On-Current of 4H-SiC MOSFETs with a Three-Dimensional Gate
Structure
Yuichiro Nanen1,a , Hironori Yoshioka1,b , Masato Noborio1,c ,
Jun Suda1,d and Tsunenobu Kimoto1-2,e
1
Department of Electronic Science and Engineering, Kyoto University A1-303 Kyotodaigaku-katsura,
Nishikyo, Kyoto 615-8510, Japan
2
Photonics and Electronics Science and Engineering Center (PESEC), Kyoto University
a
nanen@semicon.kuee.kyoto-u.ac.jp, byoshioka@semicon.kuee.kyoto-u.ac.jp,
cnoborio@semicon.kuee.kyoto-u.ac.jp, dsuda@kuee.kyoto-u.ac.jp, ekimoto@kuee.kyoto-u.ac.jp
Keywords: MOSFET, multi-gate transistor, three-dimensional gate structure, (11-20)
Abstract. 4H-SiC (0001) MOSFETs with a three-dimensional gate structure, which has a top channel
on the (0001) face and side-wall channels on the {11-20} face have been fabricated.
In advanced Si MOSFETs, MOSFETs with multi-gate structures have been extensively developed in order to increase on-current while minimizing the short-channel effects [4].
Forum Vols. 389-393 (2002), p. 985 [3] H.
Forum Vols. 527-529 (2006), p. 987 (4) , (4) , (5) . (5) .
In advanced Si MOSFETs, MOSFETs with multi-gate structures have been extensively developed in order to increase on-current while minimizing the short-channel effects [4].
Forum Vols. 389-393 (2002), p. 985 [3] H.
Forum Vols. 527-529 (2006), p. 987 (4) , (4) , (5) . (5) .
Online since: May 2005
Authors: K.Y. Cheong, Nam Kyun Kim, Wook Bahng
Kim
2, c
1
School of Materials and Mineral Resources Engineering, Universiti Sains Malaysia,
Engineering Campus, 14300 Nibong Tebal, Penang, Malaysia.
2
Power Semiconductor Research Group, Korea Electrotechnology Research Institute (KERI),
P.O.
Han: Recent Major Advances in SiC (Taylor & Francis, New York, 2003) pp. 377-391
Forum.
Forum.
Arai : Recent Major Advances in SiC (Taylor & Francis, New York, 2003) pp. 651-670
Han: Recent Major Advances in SiC (Taylor & Francis, New York, 2003) pp. 377-391
Forum.
Forum.
Arai : Recent Major Advances in SiC (Taylor & Francis, New York, 2003) pp. 651-670
Online since: October 2014
Authors: Mohd Roshdi Hassan, Yong Thian Haw
Shape Memory Alloy Applications in Bone Fixation: State of the Art
Mohd Roshdi Hassana,Yong Thian Hawb
Department of Mechanical and Manufacturing Engineering
University Putra Malaysia, 43400 Serdang, Selangor, Malaysia.
Researchers focused on incorporating advanced industrial materials, which are often developed for aeronautics, industrial, or military-specific applications, for use in human implantology.
Conf. on Medical and Biomedical Engineering, Chicago, IL 1969)
Material Science Forum;Vol.394-395,pp.45-48.(2002) [25] K.
Materials Science Forum. 394-395, 17-24. (2002) [26] M.
Researchers focused on incorporating advanced industrial materials, which are often developed for aeronautics, industrial, or military-specific applications, for use in human implantology.
Conf. on Medical and Biomedical Engineering, Chicago, IL 1969)
Material Science Forum;Vol.394-395,pp.45-48.(2002) [25] K.
Materials Science Forum. 394-395, 17-24. (2002) [26] M.
Online since: April 2015
Authors: Anna Kula, Makoto Sugamata, Tomasz Skrzekut, Grzegorz Wloch, Ludwik Blaz
Structural characterization of mechanically alloyed AlMg-CeO2 composite
Tomasz Skrzekut1,a*, Anna Kula1,b*, Ludwik Blaz1,c Grzegorz Wloch1,d
and Makoto Sugamata2,e
1 Faculty of Non-Ferrous Metals, AGH – University of Science and Technology, 30-059 Cracow, Poland
2 Department of Mechanical Engineering, College of Industrial Technology, Nihon University, 1-2-1 Izumi-cho, Narashino Chiba 275 – 8575, Japan
a skrzekut@agh.edu.pl, b kula@agh.edu.pl, c blaz@agh.edu.pl, d gwloch@agh.edu.pl e sugamata@cit.nihon-u.ac.jp,
Keywords: composite, mechanical alloying, differential scanning calorimetry, SEM, TEM
Abstract.
Combination of aluminum/magnesium matrix and ceramic reinforcement are often used to manufacture advanced light metal composites with unique mechanical properties, which combine the ductility of the metal matrix and the high stiffness of the ceramic reinforcement.
Mallick: Composites Engineering Handbook, Marcel Dekker Inc., New York, 1997
Forum 539-543 (2007) 854
Forum 396-402 (2002) 161-166
Combination of aluminum/magnesium matrix and ceramic reinforcement are often used to manufacture advanced light metal composites with unique mechanical properties, which combine the ductility of the metal matrix and the high stiffness of the ceramic reinforcement.
Mallick: Composites Engineering Handbook, Marcel Dekker Inc., New York, 1997
Forum 539-543 (2007) 854
Forum 396-402 (2002) 161-166
Online since: September 2016
Authors: Zhao Hui Wang, Shu Bo Li, Ke Liu, Xian Du, Bo Li, Wen Bo Du
Corresponding author
Zhaohui Wang;
Tel/Fax: +86-10-6739-2423;
E-mail: wangzhaohui@bjut.edu.cn;
Address: College of Materials Science and Engineering, Beijing University of Technology, No.100 Pingleyuan, Chaoyang district, Beijing 100124, China
References
[1] C.X.
The paths and strategies for increased magnesium applications in vehicles, Materials Science Forum, 488-489 (2005), 1-8
Materials Science and Engineering A, 302 (2001), 37-45
Magnesium advances and applications in North America automotive industry, Materials Science Forum, 488-489 (2005), 931-940
Microstructural and mechanical characteristics of in situ metal matrix composites, Materials Science and Engineering R, 29 (2000), 49-113
The paths and strategies for increased magnesium applications in vehicles, Materials Science Forum, 488-489 (2005), 1-8
Materials Science and Engineering A, 302 (2001), 37-45
Magnesium advances and applications in North America automotive industry, Materials Science Forum, 488-489 (2005), 931-940
Microstructural and mechanical characteristics of in situ metal matrix composites, Materials Science and Engineering R, 29 (2000), 49-113
Online since: July 2020
Authors: Vishal A. Shah, Philip Andrew Mawby, J.D. Murphy, Tian Xiang Dai, Peter Michael Gammon, Fan Li, A. Benjamin Renz, Oliver James Vavasour, G.W.C. Baker, Nicholas E. Grant, Siavash Esfahani
Shah
School of Engineering, University of Warwick, Coventry, CV4 7AL, UK
*A.Renz@warwick.ac.uk
Keywords: 4H-SiC, MOSCAP, Atomic layer deposition, Post-deposition annealing, SiO2, Reliability, TDDB
Abstract.
Chow, "4H-SiC MOS capacitors and MOSFET fabrication with gate oxidation at 1400 C," in Materials Science Forum, 2014, vol. 778: Trans Tech Publ, pp. 607-610
Rong et al., "High temperature nitridation of 4H-SiC MOSFETs," in Materials Science Forum, 2016, vol. 858: Trans Tech Publ, pp. 623-626
Roccaforte, "Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC," AIP Advances, vol. 6, no. 7, p. 075021, 2016
Wirths et al., "Improved SiO2/4H-SiC Interface Defect Density Using Forming Gas Annealing," in Materials Science Forum, 2019, vol. 963: Trans Tech Publ, pp. 465-468.
Chow, "4H-SiC MOS capacitors and MOSFET fabrication with gate oxidation at 1400 C," in Materials Science Forum, 2014, vol. 778: Trans Tech Publ, pp. 607-610
Rong et al., "High temperature nitridation of 4H-SiC MOSFETs," in Materials Science Forum, 2016, vol. 858: Trans Tech Publ, pp. 623-626
Roccaforte, "Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC," AIP Advances, vol. 6, no. 7, p. 075021, 2016
Wirths et al., "Improved SiO2/4H-SiC Interface Defect Density Using Forming Gas Annealing," in Materials Science Forum, 2019, vol. 963: Trans Tech Publ, pp. 465-468.
Online since: December 2011
Preface
Those volumes contain papers contributed to The Second International Conference
on Advances in Materials and Manufacturing (ICAMMP 2011) held on 16-18
December 2011 in Guilin, China.
The International Conference on Advances in Materials and Manufacturing Processes is the premier forum for the presentation of new advances and research results in the fields of materials and manufacturing processes.
This conference series will bring together leading researchers, engineers and scientists in the materials and processes field of interest from around the world.
The First International Conference on Advances in Materials and Manufacturing Processes (ICAMMP 2010) was successfully held from November 6-8, 2010 in Shenzhen, China.
All papers published in those volumes of journal of Advanced Materials Research have been peer reviewed through processes administered by the organizing committee.
The International Conference on Advances in Materials and Manufacturing Processes is the premier forum for the presentation of new advances and research results in the fields of materials and manufacturing processes.
This conference series will bring together leading researchers, engineers and scientists in the materials and processes field of interest from around the world.
The First International Conference on Advances in Materials and Manufacturing Processes (ICAMMP 2010) was successfully held from November 6-8, 2010 in Shenzhen, China.
All papers published in those volumes of journal of Advanced Materials Research have been peer reviewed through processes administered by the organizing committee.
Online since: February 2016
Authors: Piotr Sedek, Marek S. Weglowski, Carter Hamilton
Dymek, Relationship between Friction Stir Processing parameters and torque, temperature and the penetration depth of the tool, Archives of Civil and Mechanical Engineering 13 (2013) 186-191
Jachym, Characteristics of Nd:YAG laser welded joints of dual phase steel, Archives of Civil and Mechanical Engineering 9 (2009) 85-97
Jachym, Characteristics of Laser Welded Joints of HDT580X Steel, Materials Science Forum 638-642 (2010) 3739-3744
Hamilton, Experimental and numerical analysis of residual stress in cast aluminum alloy after FSP process, Key Engineering Materials 651-653 (2015) 1563-1568
Sedek, Using a Coupled Thermal/Material Flow Model to Predict Residual Stress in Friction Stir Processed AlMg9Si, Journal of Materials Engineering and Performance 24 (2015) 1305-1312
Jachym, Characteristics of Nd:YAG laser welded joints of dual phase steel, Archives of Civil and Mechanical Engineering 9 (2009) 85-97
Jachym, Characteristics of Laser Welded Joints of HDT580X Steel, Materials Science Forum 638-642 (2010) 3739-3744
Hamilton, Experimental and numerical analysis of residual stress in cast aluminum alloy after FSP process, Key Engineering Materials 651-653 (2015) 1563-1568
Sedek, Using a Coupled Thermal/Material Flow Model to Predict Residual Stress in Friction Stir Processed AlMg9Si, Journal of Materials Engineering and Performance 24 (2015) 1305-1312
Online since: April 2009
Authors: Ning Sun, Diran Apelian
Acknowledgments
The authors gratefully acknowledge the member companies of the Advanced Casting Research
Center (ACRC) for their support of this work, and for their continued support of research focused
on the science and technology of metal casting at Worcester Polytechnic Institute.
Materials Science and Engineering A323, 160-166
Materials Science and Engineering A, 341(1-2), pp. 307-310
[7] Mishra, R.S., Ma, Z.Y., Sharma, S.R. and Mahoney, M.W. (2006) Microstructural modification of cast aluminum alloys via FSP. (2003) Materials Science Forum, 2003 Vol. 426-432, p 2891-2896
Materials Science and Engineering A433 269-278
Materials Science and Engineering A323, 160-166
Materials Science and Engineering A, 341(1-2), pp. 307-310
[7] Mishra, R.S., Ma, Z.Y., Sharma, S.R. and Mahoney, M.W. (2006) Microstructural modification of cast aluminum alloys via FSP. (2003) Materials Science Forum, 2003 Vol. 426-432, p 2891-2896
Materials Science and Engineering A433 269-278
Online since: March 2024
Authors: Agus Dwi Anggono, Tri Widodo Besar Riyadi, Zulhendra Zulhendra, Haryanto Haryanto, Andi Hendrawan
Wear Failure Analysis of a Steel Bar Used in the Coal Screener
Zulhendra1,a, Haryanto1,b, Andi Hendrawan2 c, Tri Widodo Besar Riyadi1,d*, Agus Dwi Anggono1,e
1Faculty of Engineering, Universitas Muhammadiyah Surakarta, Jl.
Thus, the components operated at high temperatures require advanced protection using intermetallic or ceramic materials such as intermetallics-based aluminide [12][13][14] and ceramic coatings [15]
Acknowledgement The authors would like to thank the School of graduate studies, Faculty of Engineering, Universitas Muhammadiyah Surakarta, Indonesia, for the laboratory facilities.
Forum, 961 (2019)
Forum, 1029 (2021) 3–8
Thus, the components operated at high temperatures require advanced protection using intermetallic or ceramic materials such as intermetallics-based aluminide [12][13][14] and ceramic coatings [15]
Acknowledgement The authors would like to thank the School of graduate studies, Faculty of Engineering, Universitas Muhammadiyah Surakarta, Indonesia, for the laboratory facilities.
Forum, 961 (2019)
Forum, 1029 (2021) 3–8