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Development of Waxless Wafer Mounting System for Silicon Wafer Polishing Process Kyoungjin Kim1, a 1Department of Mechanical System Engineering, Kumoh National Institute of Technology, Sanho-ro 77, Gumi, Gyeongbuk 730-701, Republic of Korea a kimkj@kumoh.ac.kr Keywords: Silicon Wafer Polishing, Waxless Wafer Mounting, Wafer Demounting Abstract.
Waxless mounting and demounting on the ceramic carrier block is consisted of the following serial sub-processes.
Liu: International Journal of Machine Tools and Manufacture Vol. 48 (2008), pp. 1297-1307
Fisher: International Journal of Machine Tools and Manufacture Vol. 45 (2005), pp. 673-686
Park: Journal of the Korean Society of Semiconductor & Display Equipment Technology Vol. 8 (2009), pp. 31-35.

Grabner: Cylindrical and Profile Grinding with Boron Nitride Wheels, Proceedings of the 5th International Conference on Production Engineering, 1984, Tokyo, p. 326
Azarhoushang: Influence of ultrasonic vibrations on dry grinding of soft steel, International Journal of Machine Tools and Manufacture, Volume 48, Issue 14, November 2008, p. 1585-91
Rabiey, M.: Ultrasonic assisted dry grinding of 42CrMo4, International Journal of Advanced Manufacturing Technology, Volume 42, Numbers 9-10, 2009, p. 883-91
Azarhoushang: Intermittent grinding of ceramic matrix composites, PhD Dissertation, Stuttgart University 2011
Chandra: Using vibration assisted grinding to reduce subsurface damage, Precision Engineering Journal, 24 2000, p. 329–37.

The engineering industry is an important industry, and it is included in the secondary sector of the economy.
Zajac: “Intelligently programming of holes machining”, In: Manufacturing Engineering, No.4, Vol.
In: International Journal of Surface Science and Engineering.
In: Key Engineering Materials.
Salokyová, The Verification of Different Abrasives Types Impact on Frequency Spectrum Vibrations, Academic Journal of Manufacturing Engineering 11(2013) 108-113

Mar: International Journal of Fracture, Vol. 12 (1976), p. 451
Zhu: International Journal of Fracture, Vol. 73 (1995), p. 1
Bogy : International Journal of Fracture, Vol. 38 (1971), p. 911
Náhlík et al.: Engineering Fracture Mechanics, Vol. 77 (2010), p. 2192
Hutař: Key Engineering Materials, Vol. 417-418 (2010), p. 301

Effect of Surface Roughness and Oxidation Conditions on Wettability of Borosilicate Glass Sealant Rakesh Joshi1,a, Rahul Chhibber2,b 1Ph.D Research Scholar, Department of Mechanical Engineering, IIT Jodhpur, Rajasthan-342011, India 2Assistant Professor, Department of Mechanical Engineering, IIT Jodhpur, Rajasthan-342011, India Email: ajoshi.1@iitj.ac.in, brahul_chhibber@iitj.ac.in Keywords: Wettability, Parabolic Trough Receiver Tube, Surface Roughness, Microstructure, Micro-hardness, Tensile Strength Abstract.
S “Glass-ceramic for Ceramic/Ceramic and Ceramic/metal joining application", Thesis Doctor of Philosophy, Department of Physics Centre of Advance Material, The University of warwick (1997)
Wilson1, Methodology for metrology of wettability versus Roughness of engineering surfaces, proceeding of 14th International Congress of Metrology in Paris 22-25 June (2009)
[5] Cheng-hsien, Pi-yingCheng,”Matched glass to kovar seal in N2 and Ar atmospheres” International Journal of Minral, Metallurgy and Materials.
Cabrerizo-Vilchez, Factors affecting the measurement of roughness factor of surfaces and its implications for wetting studies, Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 323, Issues 1-3, (2008), p. 83-93

Lapping of Polycrystalline Diamond Compact (PDC) Alex Fang1,a, Elena Castell-Perez 2,b , Alex Puerta-Gomez2,c , Songsheng Zhou 3,d , and Jason Sowers3,e 1 Dept. of Engineering Technology and Industrial Distribution, Texas A&M University, USA 2 Dept. of Biological and Agricultural Engineering, Texas A&M University, USA 3 Dept. of Mechanical Engineering, Texas A&M University, USA a fang@entc.tamu.edu, becastell@tamu.edu, calexp@neo.tamu.edu, dsongsheng.zhou@gmail.com e jmsowers@gmail.com Keywords: Lapping, PDC, Polycrystalline Diamond Compact, Carbomer Abstract.
The fourth plate is a 3-slot Al2O3 ceramic plate.
Wang: Journal of Materials Processing Technology Vols. 192-193 (2007), p. 276 [3] F.
Preston: Journal of the Society of Glass technology Vol. 11 (1927), p. 214 [4] K.
Lin: The International Journal of Advanced Manufacturing Technology Vol. 20 (2002), p. 414 [5] CPKelco: Keltrol  /Kelzan  xanthan gum Book 8 th edition (CP Kelco U.S., Inc.2006), p. 4

Engineering and Technology Journal 40.1 (2022): 137-147
Engineering and Technology Journal 39.5 (2021): 821-835
Journal of Mechanical Engineering Research and Developments 44.3 (2021): 420-441
Engineering and Technology Journal 34.12 Part (A) Engineering (2016)
International Journal of Scientific & Engineering Research 5 (2014).‏

Research of Ultrahigh Speed Grinding Spindle System Based on Squeeze Film Damping Technology Tianbiao Yu, Yadong Gong, Hu Li, Jianyu Yang, Wanshan Wang Sch. of Mechanical Engineering & Automation, Northeastern Univ.
Cai: Chinese Journal of Mechanical Engineering, Vol. 42 (2006), p. 43 [2] X.M.
Mureithi: Tribology International, Vol. 34 (2001), p. 689 [8] M.A.
Hahn: Tribology International, Vol. 29 (1996), p. 51 [9] C.V.
Holmes: Journal of Engineering for Gas Turbines and Power, Vol. 126 (2004), p. 855 [12] L.

Machinability Improvement by Workpiece Preheating during End Milling AISI H13 Hardened Steel Suhaily Mokhtar¹, AKM Nurul Amin1, Anayet Ullah Patwari2 1Department of Manufacturing and Materials Engineering, Faculty of Engineering, International Islamic University Malaysia 2Department of Mechanical and Chemical Engineering, Islamic University of Technology, Bangladesh 1aakamin@iium.edu.my; ¹bsuhaily_mokhtar@yahoo.com; 2baupatwari@hotmail.com, Keywords: Surface Roughness, RSM, High Speed Machining, Inconel 718 Abstract.
Yamaha, “High speed machining of inconel 718 with ceramic tools:, Ann.
Journal Eng.
Journal of Mechanical Industrial Engineering, Vol. 2, Number 4, pp. 209-214, December 2008
Patwari,“ Development of an artificial neural network algorithm for predicting the surface roughness in end milling of inconel 718 alloy”, Proceedings of the International Conference on computer and Communication Engineering 2008, pp. 1321-1324 May 13-15 2008

Effect of gallium doping on the properties of GZO target Liu Cunqi1, a, Cai Xuexian1,b, Zhang Zhongjian2,c, Gao Ling1,d, Xiao Chao1,e, Shang Fuliang1,f, Yang Haitao1*, 1Key Laboratory of Functional Materials of Shenzhen, Shenzhen Engineering Laboratory of Advanced Technology for Ceramics Processing , College of Materials Science and Engineering, Shenzhen University, Shenzhen 518060, China 2State key Laboratory of Cemented Carbide, Suzhou Cemented Carbide Industry Company, Suzhou, 412000, China acunqiliu@163.com, b xh.xue@qq.com, ＊Corresponding author yanght63@hotmail.com Keywords: Ga2O3 content; air sintering; GZO targets Abstract.
Srivastava, et al: Growth of transparent conducting nanocrystalline Al doped ZnO thin films by pulsed laser deposition [J], Journal of Crystal Growth 2006;294: 427–431
Ceramics International, 2012: 38S: S457–S461
Materials Science and Engineering 2012: B 177: 1777– 1782
Ceramics International 2012, 38 (8), 6221–6227.