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The size of pores for micro-porous ceramics is less than 2 nm, meso-porous ceramics within the range of 2 nm to 50 nm and macro-porous ceramics with pores greater than 50 nm [3-5].
Acknowledgement The authors would like to thank the Ministry of Higher Education, Malaysia and Ministry of Science, Technology and Innovation for sponsoring this work under Grant PJP/2012/FKM (14A) S1089, Faculty of Mechanical Engineering and Universiti Teknikal Malaysia Melaka (UTeM).
Ceramics International, 38 (6) (2012) 4723–4728
Bergstrom, Structuring adsorbents and catalysts by processing of porous powders, Journal of the European Ceramic Society, 34 (2014) 1643-1666
Wu, Preparation and properties of high toughness RBAO macroporous membrane support ceramics international, 36 (7) (2010) 2025–2031

Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology Nikolay Samotaeva *, Konstantin Oblovb, Maya Etrekova c, Denis Veselovd and Anastasiya Gorshkovae National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Russian Federation, 115409 Moscow, Kashirskoe highway 31 annsamotaev@mephi.ru, bkyoblov@mephi.ru, cmoetrekova@mephi.ru, ddsveselov@mephi.ru, enastyapzspb@mail.ru Keywords: ceramic, MEMS, microhotplate, thick film technology, modeling Abstract.
The results show possibility to fast fabrication of different topologies for ceramic MEMS microhotplate in form-factor of SOT-23 type SMD package.
Experimental The laser micromilling technology used for ceramic MEMS fabrication precisely described in works [9-10].
151 (1) article 012024 [5] Oblov K, Ivanova A, Soloviev S, Samotaev N, Vasiliev A and Sokolov A, Technology for fast fabrication of glass microhotplates based on the laser processing, 2015 Physics Procedia 72 465-469 [6] Karpov E, Karpov E, Suchkov A, Mironov S, Baranov A, Sleptsov V, Energy efficient planar catalytic sensor for methane measurement, 2013 Sensors and Actuators A: Physical 194 176-180 [7] Liu Q, Yao J, Wu Y, Wang Y, Ding G, Two operating modes of palladium film hydrogen sensor based on suspended micro hotplate, International Journal of Hydrogen Energy 44 11259-11265 [8] Monereo O, Casals O, Prades J D, Cirera A, Self-heating in pulsed mode for signal quality improvement: Application to carbon nanostructures-based sensors, Sensors and Actuators, B: Chemical 226 254-265 [9] Samotaev N, Oblov K, Pisliakov A, Volkov N, Ivanova A, Gorshkova A and Zibilyuk N, Technology of Rapid Prototyping SMD MOX Gas Sensors, 2018 Proceedings of 17th International Meeting on Chemical
Sensors - IMCS 2018 [10] Samotaev N, Oblov K and Ivanova A, Laser Micromilling Technology as a Key for Rapid Prototyping SMD ceramic MEMS devices, 2018 MATEC Web of Conferences 207 article 04003 [11] Biró F, Dücso C, Hajnal Z, Riesz F, Pap A E and Bársony I, Thermo-mechanical design and characterization of low dissipation micro-hotplates operated above 500°C, 2015 Microelectronics Journal 45 (12) 1822-1828

Thermal Expansion of SrZr4-xTix(PO4)6 Ceramics Yang Wang, Yuanyuan Zhou*b, Yuanyuan Song, Luping Yang, Futian Liu*a School of Materials Science and Engineering, University of Jinan, Jinan 250022, China a*mse_liuft@ujn.edu.cn, *bmse_zhouyy@ujn.edu.cn Keywords: NZP ceramics, Low thermal expansion, Coprecipitation method, Strontium zirconium phosphate Abstract.
Ceramics International, 43(12) (2017) 9522-9530
Journal of the European Ceramic Society, 25 (2005) 1885-1893
Ceramics International, 38(5) (2012) 3807-3813
Journal of the European Ceramic Society, 25 (2005) 1885-1893

Ahmadi, A new analytical model of normal penetration of projectiles into the light-weight ceramic–metal targets, International Journal of Impact Engineering, 37 (2010) 561-567
Harding, Dynamic compression of toughened epoxy interlayers in adhesively bonded aluminium laminates, Journal De Physique.
An experimental and numerical study, International Journal of Impact Engineering, 32 (2005) 321-336
Hertel, High strain rate properties and constitutive modeling of glass, 15th International Symposium on Ballistics, Jerusalem, Israel, (1995)
Bishnoi, Constitutive modeling of aluminum nitride for large strain, high-strain rate, and high-pressure applications, International Journal of Impact Engineering, 25 (2001) 211-231

Material Removal Mechanisms of Electric Discharge MillingConductive Ceramic Weijie Chang a, Jianhua Zhang b, Tao Zhu and Tao Wang Key Laboratory of High Efficiency and Clean Mechanical Manufacturing, Ministry of Education,School of Mechanical Engineering, Shandong University, Jinan, China, 250061 a changwj1981@163.com, b jhzhang@sdu.edu.cn Keywords: Electric discharge milling; Conductive ceramic; Material removal mechanisms; Deionized water.
Introduction Advanced engineering ceramics are widely used in modern industries because of their excellent mechanical properties such as high hardness, high compressive strength, chemical stability and abrasive resistance [1].
Brans, Development of Technology and Strategies for the Machining of Ceramic Components by Sinking and Milling EDM, Annals of the CIRP 56(2007) 225-228 [2] König, W., Dauw, D.F., Levy, G., Panten, U., EDM-Future Steps towards the Machining of Ceramics, Annals of the CIRP 37(2) (1998) 623-631 [3] Yonghong Liu, Renjie Ji, Qingyun Li, et al., Electric discharge milling of silicon carbide ceramic with high electrical resistivity, International Journal of Machine Tools & Manufacture 48(2008) 1504-1508 [4] K.
Chandarana, Machining of low electrical conductive materials by wire electrical discharge machining (WEDM), Journal of Materials Processing Technology 149 (2004) 266–271 [7] B. lauwers, J.P.
Liu, et al., Investigation of material removal mechanisms in EDM of composite ceramic materials, Journal of Materials Processing Technology 149(2004) 347-352

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Ceramics International. 2023;49(13):21966-77

The ceramic is crushed into chip during the bullet penetration, and the ceramic fragment move outside and squeeze the surrounding ceramics.
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The structure safety monitoring technology, which observe the status of cracks dynamically on-line and warn real time, attracts the attention of the international engineering [1~3].
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Ultrasonic Vibration Assisted Grinding of Sintered Dental Zirconia Ceramics：An Experimental Study on Surface Roughness Song Donga, Kan Zhengb *, Xingzhi Xiaoc School of Mechanical Engineering Nanjing University of Science and Technology, Nanjing Jiangsu 210094, China.
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Liao, et al, Experimental Investigation on Rotary Ultrasonic Machining of Presintered Zirconia Dental Ceramics, Journal of Synthetic Crystals. 9 (2013) 1864-1869.
Stanco, et al, Rotary Ultrasonic Machining of Alumina Dental Ceramics: A Preliminary Experimental Study on Surface and Subsurface Damages, Journal of Manufacturing Science and Engineering. 6 (2012) 064501
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