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Online since: May 2016
Authors: Gil Yong Chung, Jie Zhang, Bernd Thomas, Willie Bowen, Daniel Adams, Darren Hansen, Edward Sanchez, Victor Torres
Statistical data on doping and thickness of 25 µm to 40 µm layer growth show results similar to standard epilayer growth (5-15 µm).
Improvements in thickness and doping uniformity as well as the reduction of epitaxial defects has boosted the quality of 25 µm to 40 µm thick epilayers.
Results and Discussion Statistical product data of 25 to 40 µm thick layers show results similar to standard (5-15 µm) epilayer growth.
Absolute values of the maximum deviation from the target of each individual data point measured per wafer is shown for thickness and doping in Fig.2.
Progress in thick epi growth was demonstrated by improvements of thickness and doping uniformity as well as epitaxy defect reduction.
Improvements in thickness and doping uniformity as well as the reduction of epitaxial defects has boosted the quality of 25 µm to 40 µm thick epilayers.
Results and Discussion Statistical product data of 25 to 40 µm thick layers show results similar to standard (5-15 µm) epilayer growth.
Absolute values of the maximum deviation from the target of each individual data point measured per wafer is shown for thickness and doping in Fig.2.
Progress in thick epi growth was demonstrated by improvements of thickness and doping uniformity as well as epitaxy defect reduction.
Online since: November 2013
Authors: Tie Neng Guo, Ting Yu Wu, Xiao Lei Song
Introduction
The most widely used approach to parameters identification is using FRFs data, which can be measured directly.
It can be seen from the FRFs with noise, noise signal in many FRFS has been completely destroyed the ideal data values, and this is accordance with the real experimental cases with noise frequency response data.
To select experimental data with this frequency selection method, and use this method to recognize bands have good noise resistance.
By this Subtraction term frequency selection method, you can select some of the band is not sensitive to noise, and get the data by identify these bands.
Celic: The influence of the coordinate reduction on the identification of the joint dynamic properties.
It can be seen from the FRFs with noise, noise signal in many FRFS has been completely destroyed the ideal data values, and this is accordance with the real experimental cases with noise frequency response data.
To select experimental data with this frequency selection method, and use this method to recognize bands have good noise resistance.
By this Subtraction term frequency selection method, you can select some of the band is not sensitive to noise, and get the data by identify these bands.
Celic: The influence of the coordinate reduction on the identification of the joint dynamic properties.
Online since: January 2015
Authors: Fa Chao Li, Qi Hui Hu
With the development of computer science and data mining technology, many scholars combine with different theories and industry backgrounds to discuss the importance measure method of attribute based on data.
Such as, Liu [3] according to the characteristics of failure data for nuclear power plant, using the powerful knowledge discovery capability of data mining method, proposed a new data standardization method, and using attribute reduction method using concept lattice, conducted a reduction process of attributes, then which can be drawn core attributes, so, we can accurately diagnose faults, Chen and Liang [4] showed the attribute reduction method based on rough set, and proved that it is a feasible reduction method in TCM syndrome data processing, the literature [5] processed one year flight test data of some flight test aircraft according to the data reduction method, and through practice, which shows that the method is useful and efficient to flight data reduction, and Qu [6] proposed the attribute reduction of the power big data pretreatment based on the cloud computing technology, and processed wind power measured data and grid fault diagnosis table on the Hadoop.
Therefore, how to combine with data mining technology and the accumulation data information, building an attribute importance measure which has the structural characteristics of fuzzy measure is an effective way to achieve information fusion.
This indicates that during the disease diagnosis process, the more aspects are considered, the more helpful for you to make the correct diagnosis; 2) there is an interaction among attributes, and the portion importance can not completely representative the sum importance (for example, when w1=0.8, w2=0.2, μ({a2})=μ({a3})=0.1<0.534=μ({a1}), but μ({a1, a2})<μ({a1,a3}); 3) μ({a1, a3})=μ(A)=1 indicates that headache or not has no effect on the diagnosis result when diagnosing whether a patient is suffering from pneumonia or flu (i.e. it only needs to consider the two attribute values that fever characterization and cough characterization); 4) μ(B) changes with w1 and w2 (for example, when w1=0.8 and w1=0.2, μ({a1, a2})=0.623, and when w1=0.2 and w1=0.8, μ({a1, a2})=0.691), this indicates that the established attribute importance measure mode not only has a good structural features, but also can take the decision consciousness into decision process simply; 5) though the amount of data in this
Such as, Liu [3] according to the characteristics of failure data for nuclear power plant, using the powerful knowledge discovery capability of data mining method, proposed a new data standardization method, and using attribute reduction method using concept lattice, conducted a reduction process of attributes, then which can be drawn core attributes, so, we can accurately diagnose faults, Chen and Liang [4] showed the attribute reduction method based on rough set, and proved that it is a feasible reduction method in TCM syndrome data processing, the literature [5] processed one year flight test data of some flight test aircraft according to the data reduction method, and through practice, which shows that the method is useful and efficient to flight data reduction, and Qu [6] proposed the attribute reduction of the power big data pretreatment based on the cloud computing technology, and processed wind power measured data and grid fault diagnosis table on the Hadoop.
Therefore, how to combine with data mining technology and the accumulation data information, building an attribute importance measure which has the structural characteristics of fuzzy measure is an effective way to achieve information fusion.
This indicates that during the disease diagnosis process, the more aspects are considered, the more helpful for you to make the correct diagnosis; 2) there is an interaction among attributes, and the portion importance can not completely representative the sum importance (for example, when w1=0.8, w2=0.2, μ({a2})=μ({a3})=0.1<0.534=μ({a1}), but μ({a1, a2})<μ({a1,a3}); 3) μ({a1, a3})=μ(A)=1 indicates that headache or not has no effect on the diagnosis result when diagnosing whether a patient is suffering from pneumonia or flu (i.e. it only needs to consider the two attribute values that fever characterization and cough characterization); 4) μ(B) changes with w1 and w2 (for example, when w1=0.8 and w1=0.2, μ({a1, a2})=0.623, and when w1=0.2 and w1=0.8, μ({a1, a2})=0.691), this indicates that the established attribute importance measure mode not only has a good structural features, but also can take the decision consciousness into decision process simply; 5) though the amount of data in this
Online since: January 2014
Authors: Ewa Skrzypczak-Pietraszek, Jacek Pietraszek
The paper contains: problem definition, presentation of the measured data and the final analysis with the fuzzy regression approach.
As a result, the data are scarce and irregular.
The median is a better description for low amount samples with non-symmetric data.
Grzegorzewski, Trapezoidal Approximation of Fuzzy Numbers Based on Sample Data, Comm.
Gastaldi, An "orderwise" polynomial regression procedure for fuzzy data, Fuzzy Set Syst. 130 (2002) 1-19
As a result, the data are scarce and irregular.
The median is a better description for low amount samples with non-symmetric data.
Grzegorzewski, Trapezoidal Approximation of Fuzzy Numbers Based on Sample Data, Comm.
Gastaldi, An "orderwise" polynomial regression procedure for fuzzy data, Fuzzy Set Syst. 130 (2002) 1-19
Online since: January 2013
Authors: Qing Chun Jon Zhang, Jennifer Duc, Van Mieczkowski, Brett Hull, Scott Allen, John W. Palmour
The much reduced field at the Schottky interface allows an increase in the drift doping concentration, which enables a significant chip size reduction on next generation SiC (Silicon Carbide) Schottky diodes.
The micro-pipe density on SiC has been routinely reduced to <1 cm2, along with a continuous reduction in threading dislocations.
The experimental data have proven out that the trench JBS design reduces the reverse leakage current significantly.
The reduction of the Schottky interface field in turn allows utilizing a highly doped drift layer to shrink the die size, or implementing a Schottky material with lower barrier height for lower Schottky turn-on voltage.
Significant chip size reduction on next generation SiC Schottky diodes has been achieved by utilizing the newly developed trench structure.
The micro-pipe density on SiC has been routinely reduced to <1 cm2, along with a continuous reduction in threading dislocations.
The experimental data have proven out that the trench JBS design reduces the reverse leakage current significantly.
The reduction of the Schottky interface field in turn allows utilizing a highly doped drift layer to shrink the die size, or implementing a Schottky material with lower barrier height for lower Schottky turn-on voltage.
Significant chip size reduction on next generation SiC Schottky diodes has been achieved by utilizing the newly developed trench structure.
Online since: March 2012
Authors: A. Adamus, J. Jozwiakowska, R.A. Wach, D. Suarez-Sandoval, K. Ruffieux, J.M. Rosiak
The data were collected through three scans: first heating, cooling, second heating.
This data confirms that volume fraction of PLLA/TCP 70/30 amounts for 48/52 by weight.
The data are similar to those presented for PLLA/HA composite [20].
After compression moulding, it drops from 214.1 to 209,9 and from 0.249 to 0.235 dm3 g1 for PLLA and PLLA/TCP, respectively.Based on those data we can conclude that thermal processing of the PLLA causes its degradation resulted in viscosity reduction.
On the other hand, 12 months of incubation caused only slight reduction in molecular weight of the polymer in PLLA/TCP samples.
This data confirms that volume fraction of PLLA/TCP 70/30 amounts for 48/52 by weight.
The data are similar to those presented for PLLA/HA composite [20].
After compression moulding, it drops from 214.1 to 209,9 and from 0.249 to 0.235 dm3 g1 for PLLA and PLLA/TCP, respectively.Based on those data we can conclude that thermal processing of the PLLA causes its degradation resulted in viscosity reduction.
On the other hand, 12 months of incubation caused only slight reduction in molecular weight of the polymer in PLLA/TCP samples.
Online since: September 2013
Authors: Ya Zhen Li, Ya Jing Wang, Li Qun Huang
Original PTS algorithm
The main idea of PTS algorithm is dividing the input data into blocks, optimizing coefficient of each block, and last combining these blocks.
The principle diagram of PTS method First, define data symbol with vector X(X1,X2,…XN-1),then divide X into non-overlapped blocks, the number of blocks is V and the length of each block is N/V.
The position don’t inherit original data is zero.
The sending data on the first antenna call PTS algorithm to obtain coefficient vector A which have the best performance of PAPR.
So we could use vector B changing the data on the second antenna directly without the process of IFFT transformation and the process of searching for the coefficient vector.
The principle diagram of PTS method First, define data symbol with vector X(X1,X2,…XN-1),then divide X into non-overlapped blocks, the number of blocks is V and the length of each block is N/V.
The position don’t inherit original data is zero.
The sending data on the first antenna call PTS algorithm to obtain coefficient vector A which have the best performance of PAPR.
So we could use vector B changing the data on the second antenna directly without the process of IFFT transformation and the process of searching for the coefficient vector.
Online since: August 2023
Authors: Charles Miller, Rey Tanaka, Jun Shibukawa, Nukui Hiroki, Yamamoto Tetsuya, Hayashi Masayuki, Shibayama Nobuyuki, Endo Toru, Jim Snow
Reduction of Process Chemicals and Energy Use
in Single-Wafer Process Applications
Jim Snow1,a*, Charles Miller1,b, Rey Tanaka1,c, Jun Shibukawa2,d,
Nukui Hiroki2,e, Yamamoto Tetsuya2,f, Hayashi Masayuki1,g,
Shibayama Nobuyuki2,h and Endo Toru2,i
1SCREEN SPE USA, LLC, 3151 Jay Street, Suite 210, Santa Clara, CA 95054, U.S.A.
2SCREEN Semiconductor Solutions Co., Ltd., 480-1, Takamiya-cho, Hikone, Shiga 522-0292, Japan
ajim.snow@screen-spe.com, bcharles.miller@screen-spe.com, crey.tanaka@screen-spe.com, dsibukawa@screen.co.jp, enukui@screen.co.jp, ft.yamamoto@screen.co.jp, gwada.hayashi@screen-spe.com, hshibayama@screen.co.jp, iendo@screen.co.jp
Keywords: Sustainability, recycle, reclaim, UPW, SPM, ozone.
The reduction of water through use of dilute chemistries [3,4] and recycling of wafer rinse water [5,6] has previously been reported.
Since wet cleaning accounts for a significant percentage of all processes, reduction of UPW and SPM presents an opportunity for engineered solutions to improve the efficiency of UPW and chemical use.
Figure 2: 80°C Temperature stability performance data.
Resist strip and >26-nm particle performance of the reclaimed SPM was demonstrated to be equivalent to single-pass SPM, and 70% reduction of SPM volume has been realized at customer sites worldwide [9,12].
The reduction of water through use of dilute chemistries [3,4] and recycling of wafer rinse water [5,6] has previously been reported.
Since wet cleaning accounts for a significant percentage of all processes, reduction of UPW and SPM presents an opportunity for engineered solutions to improve the efficiency of UPW and chemical use.
Figure 2: 80°C Temperature stability performance data.
Resist strip and >26-nm particle performance of the reclaimed SPM was demonstrated to be equivalent to single-pass SPM, and 70% reduction of SPM volume has been realized at customer sites worldwide [9,12].
Online since: December 2024
Authors: Amit Sain, Ghanshyam Balotiya, Arun Gaur, Prakash Somani
PCM’s incorporated into concrete pavements have shown significant temperature reduction effects, mitigating thermal stresses.
The reduction of urban heat island effects and energy demand ties into SDG 13, while improved energy efficiency supports SDG 7.
This data serves as the foundation for further calculations of temperature stresses within the scope of this current investigation.
Figure 5 reveals significant reductions in curling stress with increasing percentages of PCM.
Meanwhile, the P12 demonstrated significant thermal stress reduction but lacked balanced mechanical strengths compared to the P8 mix.
The reduction of urban heat island effects and energy demand ties into SDG 13, while improved energy efficiency supports SDG 7.
This data serves as the foundation for further calculations of temperature stresses within the scope of this current investigation.
Figure 5 reveals significant reductions in curling stress with increasing percentages of PCM.
Meanwhile, the P12 demonstrated significant thermal stress reduction but lacked balanced mechanical strengths compared to the P8 mix.
Online since: July 2021
Authors: Jadesupa Palrungsri, Parames Chutima
Another one factor, quality of water, was improved by adding a check item to monitor and collect data during the initial implementation stage.
Define Phase As re-check historical data in 2020, the times of T.Al in degreasing bath that lower than lower control limit (LCL) at 18.2 points more frequency compared to the previous months as shown in Table 1.
The controller will feed raw material A every 10 vehicle units with average consumption from historical data.
Because there was no historical data for compassion.
Contactless Chip Module Defect Reduction.
Define Phase As re-check historical data in 2020, the times of T.Al in degreasing bath that lower than lower control limit (LCL) at 18.2 points more frequency compared to the previous months as shown in Table 1.
The controller will feed raw material A every 10 vehicle units with average consumption from historical data.
Because there was no historical data for compassion.
Contactless Chip Module Defect Reduction.