Reduction of Process Chemicals and Energy Use in Single-Wafer Process Applications

Abstract:

The semiconductor industry is a significant consumer of water and chemicals. In particular, water is a valuable resource, and its efficient use is crucial to ensure availability for future generations. By implementing measures to reduce water and chemical consumption, the semiconductor industry can minimize its environmental footprint and contribute to sustainability efforts. Technology for the recycling of unused hot ultrapure water (H-UPW), ozonated water and reclaimed sulfuric acid-hydrogen peroxide mixtures (SPM) has been developed and installed in high-volume manufacturing (HVM) semiconductor manufacturing facilities. This paper presents an overview of the technology and expected savings in water, sulfuric acid and energy consumption from the implementation of these technologies.

• Periodical: Solid State Phenomena (Volume 346)
• Pages: 296-301
• DOI: https://doi.org/10.4028/p-AdO9kI
• Online since: August 2023
• Authors: Jim Snow*, Charles Miller, Rey Tanaka, Jun Shibukawa, Nukui Hiroki, Yamamoto Tetsuya, Hayashi Masayuki, Shibayama Nobuyuki, Endo Toru
• Keywords: Ozone, Reclaim, Recycle, SPM, Sustainability, UPW

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