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During grinding, the silicon wafer is held on a porous ceramic vacuum chuck, the grinding wheel and the wafer are rotated about their own axes of rotation simultaneously, the grinding wheel is supplied an axial down feed, as shown in Fig. 1.
Guttler: Precision Engineering, Vol.16 (1994), pp.139
Zarudi: International Journal of Mechanical Sciences, Vol.43 (2001), pp.1985
Duduch: Journal of Materials Science Letters, Vol.18 (1999), pp.1185

Lattice Structure and Magnetic Behavior of Ga Ion Doped Multiferroics CaMn7O12 Wen-zhi Li1, De-xiang Fu1, Yu-zhuang Liu1, Yang Wang1, Liang Xie3, Yong-tao Li2, Wei Chen2, Li-xia Wang2 and Hong-guang Zhang2,a* 1College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China 2Center of Advanced Functional Ceramics, College of Science, Nanjing University of Posts and Telecommunications, Nanjing 210023, China 3Department of Physical and Chemical Sciences, North China University of Technology, Beijing 100144, China a*hgzhang_njupt@hotmail.com Keywords: Multiferroics, Lattice structure, CaMn7O12, Magnetism, Doping Abstract.
Xie, International Journal of Modern Physics B, 29(2015)1550221
Journal of Inorganic Chemistry, 32(2016)762

Noguchi, Study on the bonding of patch repair material applied to deteriorated reinforced concrete structure (in Japanese), Journal of Structural and Construction Engineering, AIJ. (2007) 61-67
Matsubayashi, Outdoor exposure test of repair performance on corrosion of reinforcing bar with section recovery method (in Japanese), Journal of Structural and Construction Engineering, AIJ. 73(2008) 1913-1920
Tottri, Development of high quality patching method by applying wet spraying, using polymer cement mortar and set accelerating agent (in Japanese), JSCE Journal of Construction Engineering and Management. 62(2006) 459-472
Matsumoto, Effect of type of powdered antifoamer on properties of polymer-modified mortars using redispersible polymer powders with powdered shrinkage-reduction agent, Proceedings of the 4th ASPIC, Chuncheon, Korea, Korea Science & Engineering Foundation
Shirai, Fire-protecting performance of polymer-modified mortars for buildings and proposal for fire-protecting performance test methods for them (in Japanese), Journal of Structural and Construction Engineering, AIJ. 73(2008) 1449-1457

Journal of environmental chemical engineering, 6(4), 4676-4697
Ceramics International, 41(3), 3355-3364
Journal of Cleaner Production, 313, 127758
Journal of Magnetism and Magnetic Materials, 563, 169903
Ceramics International. 47(6)

Composites Part B: Engineering, 2013. 55(0): p. 324-337
ISCA Journal of Engineering Sciences, 2012. 1(1): p. 35-39
Power Engineering Review, IEEE, 1998. 18(12): p. 4-9
International Journal of Computer, Information, and Systems Science, and Engineering, 2007. 1(4): p. 259-262
KSCE Journal of Civil Engineering, 2013. 17(1): p. 202-209

Gaidys4, e 1 International Studies Center, Kaunas University of Technology, A.
Bubulis: Proc. 11th International Power Electronics and Motion Control Conference, Riga, Latvia (2004)
Luy: Journal of Semiconductor Technology and Science, Vol. 2 (2002), p. 237-245 [10] H.
International Conference on Modeling and Simulation of Microsystems, Vol. 1 (2001), p. 402-405 [14] A.
Petitgrand: Journal of Micromechanics and Microengineering, No. 13 (2003), p. 23-33 [15] Y.

Zhang [1, 2] studied the micro-scale laser bending of ceramics, silicon, and stainless steel by using a pulsed and a CW laser respectively.
GA has been applied to optimizations of scientific, engineering and economic problems.
Richard Zhang, Xianfan Xu, High Precision micro scale bending by pulsed and CW lasers, Journal of Manufacturing Science and Engineering.
Xu, Numerical Simulation of Pulsed Laser Bending, Journal of Applied Mechanics.Vol.69 (2002) 254-260
M409(2003)1-10 [5] Mitsuo Gen, Runwei Cheng, Genetic Algorithms and Engineering Optimization, Beijing: Tsinghua University Press, China, 2000

High-speed non-shell variable frequency motor is mounted on the spindle though the interference sleeve, the front and rear of spindle unit is supported by two angular contact compound ceramic ball bearings, both are installed back-to-back, the front is axial restraint and the rear is preload by constant pressure spring in order to allow trace mobile to accommodate heated axial elongation of spindle.
Tu: International Journal of Machine Tools & Manufacture, Vol 39 (1999) pp 1345-1366
Tu: Journal of Manufacturing Science and Engineering, Vol 123(2001 ) No. 8, pp 494-505

Research on the Fracture Property of Glass Plate under Uniform Pressure Zhe Wu1, a, Binghai Lv2, b, Julong Yuan2,c, Chengwu Wang2,d, Ducnam Nguyen1 and Ping Zhao2 1National Engineering Research Center for High Efficiency Grinding, Hunan University, Changsha 410082, P.
Warren: Journal of the European Ceramic Society Vol. 21 (2001) p. 335-342 [4] S.M.
Maxwell, in: Proceeding of the 2nd international workshop on Adaptive Optics for Industry and Medicine, edited by Gordon D.
Wan: Journal of TianJin University of Light Industry Vol. 18, Special issue for math (2003) p. 43-45

SiC/SiO2 Coating on Matrix Graphite Spheres of HTR Fuel Element Produced by a Two-step Pack Cementation/High-temperature Oxidation Process Ping Zhou, Zi-qiang Li, Hong-sheng Zhaoa, Kai-hong Zhang, Xiao-xue Liu and Bing Liu Institute of Nuclear and New Energy Technology, Tsinghua University, Collaborative Innovation Center of Advanced Nuclear Energy Technology, Key Laboratory of Advanced Reactor Engineering and Safety, Ministry of Education, Beijing, 100084, China ahshzhao@tsinghua.edu.cn Keywords: HTR, Matrix graphite spheres, SiC/SiO2, Oxidation resistance Abstract.
Influence of infiltration temperature on the microstructure and oxidation behavior of SiC–ZrC ceramic coating on C/C composites prepared by reactive melt infiltration [J].
Ceramics International, 2015, 41: 797-811
Journal of Nuclear Materials, 2014, 445(1-3): 30-36
Materials Science and Engineering of Powder Metallurgy. 2011, 16(2): 231.