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Ordering of Self-Assembled Nanodots Improved by Guide Pattern with Low Line Edge Roughness for 5 Tbit/in.2 Patterned Media Takuya Komoria, Miftakhul Hudab, Takashi Akahane, Muneyasu Masudac, Jing Liud, Zulfakri Bin Mohamade,You Yinf, and Sumio Hosakag Graduate School of Engineering, Gunma University, 1-5-1 Tenjin, Kiryu, Gunma 376-8515, Japan E-mail: at11801314@gunma-u.ac.jp, bt12802274@gunma-u.ac.jp, ct09303038@gunma-u.ac.jp, dt11801376@gunma-u.ac.jp, ezulfakri@gunma-u.ac.jp, fyinyou@gunma-u.ac.jp, ghosaka@el.gunma-u.ac.jp Keywords: self-assembly, Nanodot, Block copolymer, EB writing, HSQ resist, Salty development, Patterned media Abstract We investigated the possibility of ordering of 12 nm pitced self-assembled nanodots from block copolymer (BCP) improved by the guide pattern with low line edge roughness (LER) for patterned media.
Kim et al. reported salty development was effective to enhance the resolution of HSQ resist pattern [5] and we demonstrated the fine dot arrays by using this development technique [6].

Benža et al: Folk architecture and urban planning of rural settlements in Slovakia.
El-Shishiny: Influences of wind flow over heritage sites: a case study of the wind environment over the Giza Plateau in Egypt.

Xu et al. studied three-level supply chain model which retailer regarded CVaR minimum as objective function of the material supplier, manufacturer and retailer[9].
Vol. 3(2013), p. 106, In Chinese [2] Fouad El Ouardighi: International Journal of Production Economics.

Al-Sunni, M.
El-Shafie , Design of a fuzzy servo-controller, Fuzzy Sets and Systems. 124.2 (2001) 231-247

M ercer kern el based clust ering in feature space[ J] .I EEE T ransac tions on Neur al Netw orks , 2002, 13( 3 ) : 780-784

Alim and K.
El Abed and A.

Dougherty and Hossny EL-Sherief.
De Cuyper et al.

El-Shekeil, S.M.
Al-Shuja’a, Effect of alkali treatment on mechanical and thermal properties of Kenaf fiber-reinforced thermoplastic polyurethane composite, Express Polymer Letters, Vol 6.

The incorporation of MoO3 into phosphate glasses was studied in Na2O(Li2O)-MoO3-P2O5 glasses by Bih et al. [8].
El Omari, J.M.

D'Heedene et al. [7] proposed a novel framework based on second-generation wavelets for solving elliptic partial differential equations over irregularly spaced meshes on bounded domains.
So the characteristic equation of cracked structure is given as   2 ,0 i  KM, (12) where, crack relative size 1/ad , crack relative location 1/eL .