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Online since: November 2011
Authors: Wei Li, Mao Yang Wu, Min He, Jun Wei Fu, Ya Dong Jiang
[8] Wang Xin, Yu Xiao-mei and Tian Da-yu, “Infrared absorbance of SiNx and SiC,” Chinese Journal of Sensors and Acturators, vol. 19, No. 5, Oct. 2006, pp.1778-1780, 1784, doi:1004-1699(2006) 05-1778-03
[9] He Le-nian, “Plasma-Enhanced Vapor Deposition Amorphous SiOx:H(0≤x≤2.0) Films by Infrared Absorption Spectroscopy,” Chinese Journal of Semiconductors, vol. 22, No.5, May 2001, pp. 587-593, doi: 0253-4177(2001) 05-0587-07
[10] Shibin Li, Zhiming Wu, Naiman Liao, Yadong Jiang, Wei Li, Junsheng Yu,“Optical Property Analysis of Microbolometer Based on MEMS,” Proc, ASME, vol.