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Books by Keyword: Oxygen Precipitates
Books
Edited by:
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Online since: July 1997
Description: Defect control relies more and more upon advanced fabrication approaches such as the use of slow pulling rates and hydrogen annealing. Gettering techniques remain of key importance in enhancing the device yield.
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