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Books by Keyword: PH₃

Books

Hydrogen in Compound Semiconductors

Edited by: S.J. Pearton

Online since: December 1993

Description: State-of-the-art reviews on all the major areas of interest are brought together in this book, namely the role of hydrogen during epitaxial growth, its entry into the material during processing, its subsequent diffusivity and bonding with dopants, other impurities or defects, its effect on device performance and reliability and positive uses for hydrogen in passivating surfaces.