Description: Volume is indexed by Thomson Reuters CPCI-S (WoS).
Collection of selected, peer reviewed papers from the 2013 4th International Conference on Computing, Control and Industrial Engineering (CCIE2013), October 27- 28, 2013, Wuhan, Hubei, China.
The 141 papers are grouped as follows:
Chapter 1: Machinery, Equipment, Automation and Control;
Chapter 2: Energy, Electrical Engineering and Electronics;
Chapter 3: Industrial Engineering;
Chapter 4: Other Related Topics.

Intelligent System, Applied Materials and Control Technology

Edited by: J.H. Wu

Online since: January 2013

Description:

Selected, peer reviewed papers from the 2013 International Conference on Intelligent System, Applied Materials and Control Technology (GSAMCT 2013), January 13-15, 2013, Taiyuan, Shanxi, China.
The 112 papers are grouped as follows:
Chapter 1: Advanced Technologies in Materials Science and Engineering, Assessment of Materials;
Chapter 2: Advanced Computer and Information Technology, Applications Simulation, Measurements and Electronics Engineering;
Chapter 3: Advanced Mechanical, Manufacturing and Building Engineering, Control Technology.

Rapid Thermal Processing and beyond: Applications in Semiconductor Processing

Edited by: W. Lerch and J. Niess

Online since: March 2008

Description: Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of integrated circuit technology. In order to minimize undesired diffusion, and other thermal budget-dependent effects, the trend has been to reduce the annealing time sharply by switching from standard furnace batch-processing (involving several hours or even days), to rapid thermal processing involving soaking times of just a few seconds. This transition from thermal equilibrium, to highly non-equilibrium, processing was very challenging and is still a field ripe for further development.