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Ultra Clean Processing of Semiconductor Surfaces XIV

Edited by: Dr. Paul W. Mertens, Marc Meuris and Marc Heyns

Online since: August 2018

Description: The 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018, Leuven, Belgium, September 3-5, 2018) was organized by IMEC and the scope of this symposium includes all issues related to contamination, cleaning and surface preparation in mainstream large-scale Integrated Circuit manufacturing. This collection will be interesting and useful for experts in the field of microelectronics.