The 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018, Leuven, Belgium, September 3-5, 2018) was organized by IMEC and the scope of this symposium includes all issues related to contamination, cleaning and surface preparation in mainstream large-scale Integrated Circuit manufacturing. This collection will be interesting and useful for experts in the field of microelectronics.

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Info:

eBook:

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ToC:

Table of contents

Editors:

Dr. Paul W. Mertens, Marc Meuris and Marc Heyns

DOI:

https://doi.org/10.4028/b-YriXa9

THEMA:

TDP, TGM, TJ

BISAC:

TEC008000, TEC020000, TEC021000

Keywords:

Contamination, Etching, Interconnects, Microelectronics, Particle Removal, Pattern Collapse, Semiconductors, Surface Cleaning, Surface Functionalization, Wetting Drying

Details:

Selected, peer reviewed papers from the 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018), September 3-5, 2018, Leuven, Belgium

Pages:

356

Year:

2018

ISBN-13 (softcover):

9783035714173

ISBN-13 (CD):

9783035724172

ISBN-13 (eBook):

9783035734171

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Ringgold Subjects:

Materials Science