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Gettering and Defect Engineering in Semiconductor Technology IV
Description:
The volume contains 78 contributions to the important field of semiconductor defect control and defect engineering.
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Info:
eBook:
ToC:
Editors:
M. Kittler and H. Richter
THEMA:
TGM
BISAC:
TEC021000
Keywords:
Details:
Proceedings of the 4th International Conference on Gettering and Defect Engineering In Semiconductor Technology (GADEST '91), Frankfurt, Germany, October 1991
Pages:
660
Year:
1991
ISBN-13:
9780878495689
ISBN-13 (CD):
9783038596165
ISBN-13 (eBook):
9783035703016
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