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This proceedings volume contains 126 contributions from the 11th international meeting on Gettering and Defect Engineering in Semiconductor Technology GADEST 2005 held at “La Badine” at the Giens peninsula south of France.

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eBook:

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ToC:

Table of contents

Editors:

Bernard Pichaud, A. Claverie, Prof. Daniel Alquier, Hans Richter and Martin Kittler

DOI:

https://doi.org/10.4028/b-fI5R58

THEMA:

TGM

BISAC:

TEC021000

Keywords:

Annealing, Defect, Dislocation, DLTS, Germanium, Gettering, Hydrogen, Ion Implantation, Oxygen, Silicon

Details:

Proceedings of the 11th International Autumn Meeting, Giens, France, September 25-30, 2005

Pages:

830

Year:

2005

ISBN-13 (softcover):

9783908451136

ISBN-13 (CD):

9783035719819

ISBN-13 (eBook):

9783038130291

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