Ion Implantation in Semiconductors

Ion Implantation in Semiconductors

Description:

The volume presents approximately 30 invited contributions.

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Info:

Editors:
D. Stievenard and J.C. Bourgoin
THEMA:
TGM
BISAC:
TEC021000
Pages:
480
Year:
1988
ISBN-13:
9780878495757
ISBN-13 (CD):
9783038596172
ISBN-13 (eBook):
9783035703023
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