Engineering Research
Materials Science
Engineering Series
Nanoscaled Semiconductor-on-Insulator Materials, Sensors and Devices
Description:
Volume is indexed by Thomson Reuters CPCI-S (WoS).
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Review from Ringgold Inc., ProtoView:
The 21 selected papers cover the technology of semiconductor-on-insulator (SOI) structures and devices; the physics of new SOI devices; SOI sensors and mechanical and electro-mechanical systems; and nanodots, nanowires, and nanofilms. Among the topics are hydrogen gettering within processed oxygen-implanted silicon, semi-analytical models of field-effect transistors with low-dimensional channels, polysilicon on insulator structures for sensor application at electron irradiation and magnetic fields, routes towards novel active pressure sensors in SOI technology, and interfaces and bulk properties of high-K gadolinium and neodymium oxides on silicon.