Insights on Amorphous Silicon Nip and MIS 3D Position Sensitive Detectors

Article Preview

Abstract:

This work aims to report results of the spatial and frequency optical detection limits of integrated arrays of 32 one-dimensional amorphous silicon thin film position sensitive detectors with nip or MIS structure, under continuous and pulsed laser operation conditions. The arrays occupy a total active area of 45 mm2 and have a plane image resolution better than 15 m with a cut-off frequency of about 6.8 kHz. The non-linearity of the array components varies with the frequency, being about 1.6% for 200 Hz and about 4% for the cut-off frequency (6.8 kHz).

You might also be interested in these eBooks

Info:

Periodical:

Materials Science Forum (Volumes 514-516)

Pages:

13-17

Citation:

Online since:

May 2006

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2006 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] S. Middelhoek, S.A. Audet: Microelectronics and Signal Processing - Silicon Sensors, Academic Press, London, 1989.

Google Scholar

[2] E. Fortunato, F. Soares, P. Teodoro, N. Guimarães, M. Mendes, H. Águas, V. Silva, R. Martins. Thin Solid Films 337 (1999) 222.

DOI: 10.1016/s0040-6090(98)01381-9

Google Scholar

[3] E. Fortunato, L. Pereira, H. Águas, I. Ferreira, R. Martins, Sensors and Actuators A: Physical, 116, 1 (2004) 119.

Google Scholar

[4] R. Martins, E. Fortunato: Thin Film Position Sensitive Detectors: From 1D to 3D Applications, ed. by R. Street, Technology and Applications of Amorphous Silicon (Springer-Verlag, 2000), chap. 8. 342-409.

DOI: 10.1007/978-3-662-04141-3_8

Google Scholar

[5] H. Kahmen, M. Roic: A new generation of measurement robots for object reconstruction without targeting, in Optical 3d Measurements III, eds. A. Grün and H. Kahemen, Karlsruche, Germany, Herbert Wichmann Verlag (1995) pp.251-262.

Google Scholar

[6] D. Brida, E. Fortunato, I. Ferreira, H. Águas, R. Martins, J. N.-Cryst. Sol. 299-302 (2002) 1277. [7 E. Fortunato, R. Martins, Sensors & Actuators A 68 (1998) 244.

Google Scholar

[8] James E. Harvey in Handbook of Optics, edited by Michael Bass Vol. II, chapter 11, (1995)

Google Scholar

[9] N. Koren, Understanding of Image Sharpness, Amazon.com (2004).

Google Scholar