Paper Titles

Texture Evolution in TiN, TaN and W₂N Thin Films
p.1591

Microstructure and Texture of Electrodeposited Cu on TiN Thin Films without a Cu Seed Layer
p.1597

Rietveld Texture and Stress Analysis of Thin Films by X-Ray Diffraction
p.1603

The Effect of Substrate Texture and Electroplating Conditions on the Texture and Surface Morphology of Copper Electrodeposits
p.1609

Effects of Local Texture and Grain Structure on the Sputtering Performance of Tantalum
p.1615

Texture Evolution in CVD-Grown Diamond Analyzed by Micro-Diffraction
p.1621

Texture Investigations In Damascene Copper Interconnects
p.1627

Texture and Grain Structure of Iron Film Obtained by CVD with Imposition of Magnetic Field
p.1633

Texture Evolution of Cu Thin Films during Annealing
p.1639

HomeMaterials Science ForumMaterials Science Forum Vols. 408-412Effects of Local Texture and Grain Structure on...

Effects of Local Texture and Grain Structure on the Sputtering Performance of Tantalum

Article Preview

Abstract:

You might also be interested in these eBooks

Textures of Materials - ICOTOM 13

Info:

Periodical:

Materials Science Forum (Volumes 408-412)

Pages:

1615-1620

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.408-412.1615

Citation:

Cite this paper

Online since:

August 2002

Authors:

Christopher A. Michaluk, David P. Field, Kevin A. Nibur, Stuart I. Wright, Ronald A. Witt

Keywords:

Electron Backscatter Diffraction (EBSD), Grain Size, Orientation Image Microscopy (OIM), Sputtering, Tantalum, Texture Banding, Texture Gradients

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2002 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation: