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Preparation of Porous 4H-SiC by Surface Anodization

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Abstract:

The preparation of porous 4H-SiC by electrochemical etching of SiC crystals was investigated. The porous layer was created at the porous SiC (PSC)/SiC interface but not from the SiC/electrolyte interface. The nanopores at the adjacent region of PSC/SiC interface were bigger than those at the top region. In the visible light region, the optical reflectance from PSC exhibits interference fringes. In the Reststrahlen region, the fourier transform infrared (FTIR) reflectance of porous 4H-SiC shows a splitting into more bands: a broad band with high reflectivity at low frequency and several sharp peaks near the LO frequency. The width and shape of FTIR spectra depended on the anodization current density. The anodization current density is a crucial parameter which determined the porosity, porosity depth profile, and the thickness of PSC layers. A pore transformation of porous structure was observed after chemical vapor deposition process.

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Periodical:

Materials Science Forum (Volumes 483-485)

Pages:

257-260

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.483-485.257

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Online since:

May 2005

Authors:

Yi Chen, Satoko Shoji, S. Sugishita, Satoru Ohshima, Shigehiro Nishino

Keywords:

FT-IR, Optical Reflectance, PL, Porosity, Porous 4H-SiC, Surface Anodization

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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