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Articles by author: M. Baeyens

• Evaluation of Cleaning Recipes Based on Ozonated Water for Pre-Gate Oxide Cleaning
  Published in: Ultra Clean Processing of Silicon Surfaces (p119)
• Gas-Phase Surface Processing Prior to 3.2 nm Gate Oxidation
  Published in: Ultra Clean Processing of Silicon Surfaces (p85)
• Hydrogen Peroxide Decomposition in Ammonia Solutions
  Published in: Ultra Clean Processing of Silicon Surfaces (p15)
• Influence of Frequency on the Removal Efficiency of Nano-Particles in a Megasonic Spray Cleaning Tool
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p147)
• Influence of Hardware and Chemistry on the Removal of Nano-Particles in a Megasonic Cleaning Tank
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p143)
• Role of UV/Chlorine Exposure during Dry Surface Conditioning before Integrated Epi Deposition Process
  Published in: Ultra Clean Processing of Silicon Surfaces (p233)
• Single Step Alkaline Cleaning Solution for Advanced Semiconductor Cleaning
  Published in: Ultra Clean Processing of Silicon Surfaces (p23)