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Articles by author: Marc Veillerot

• Deposition Behavior of Volatile Acidic Contaminants on Metallic Interconnect Surfaces
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p365)
• Estimation of Detrimental Impact of New Metal Candidates in Advanced Microelectronics
  Published in: Ultra Clean Processing of Semiconductor Surfaces VIII (p247)
• Mapping of Metallic Contamination Using TXRF
  Published in: Ultra Clean Processing of Semiconductor Surfaces VIII (p269)
• Organic Contamination: Purge Gas Impact in Plastic Storage Boxes
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p105)
• Particle Adhesion on Tool Kit Part: Case Study for Ceramic Material
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p203)
• Plastic Containers Contamination by Volatile Acids : Accumulation, Release and Transfer to Cu-Surfaces during Wafers Storage
  Published in: Ultra Clean Processing of Semiconductor Surfaces VIII (p251)
• Resist Stripping for Advanced FEOL Nodes: Improvements to Process Based on Ozone Diffusion by Use of Additives
  Published in: Ultra Clean Processing of Silicon Surfaces VII (p301)
• Study of the Volatile Organic Contaminants Absorption and their Reversible Outgassing by FOUPs
  Published in: Ultra Clean Processing of Semiconductor Surfaces IX (p143)
• Thermal Evolution of (100) Silicon and Chemical Oxides as Seen by ATR Spectroscopy
  Published in: Ultra Clean Processing of Silicon Surfaces VI (p183)