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Articles by author: Mohammad B. Shabani

• A Quantitative Method of Metal Impurities Depth Profiling for Gettering Evaluation in Silicon Wafers
  Published in: Gettering and Defect Engineering in Semiconductor Technology VII (p81)
• Determination of Effective Diffusion Coefficient of Copper in Silicon by Diffusion from Bulk into the Polysilicon Backside
  Published in: Gettering and Defect Engineering in Semiconductor Technology XI (p385)
• Iron Solubility in Boron-Doped Silicon and Fe Gettering Mechanism in p/p⁺ Epitaxial Wafers
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p331)
• Strain and Gettering in Epitaxial Silicon Wafers
  Published in: Gettering and Defect Engineering in Semiconductor Technology VII (p355)
• Study of Gettering Mechanisms in Silicon: Competitive Gettering between Phosphorus Diffusion Gettering and Other Gettering Sites
  Published in: Gettering and Defect Engineering in Semiconductor Technology XII (p399)
• Tuning Oxygen Concentration at Low and High Temperature IG Process and Boron Concentration in Epitaxial Wafer for the Gettering of Metal Impurities
  Published in: Gettering and Defect Engineering in Semiconductor Technology X (p539)