A High Precision AFM for Nanometrology of Large Area Micro-Structured Surfaces

Authors: J. Aoki, Wei Gao, S. Kiyono, T. Ono

AFM with the Slope Compensation Technique for High-Speed Precision Measurement of Micro-Structured Surfaces

Authors: Yu Guo Cui, Bing Feng Ju, J. Aoki, Yoshikazu Arai, Wei Gao

Development of Nanometrology for Nanoelectronics: Growth and Characterization of Transition Metal Monolayer Films on Silicon

Authors: N.I. Plusnin, W.M. Il'yashenko, S.A. Kitan, S.V. Krylov

Merging Phase Shifting Interferometry with Confocal Chromatic Microscopy

Authors: Joseph Cohen-Sabban

Metrology Method of Line Edge Roughness with Nanometer Scale Precision Using Atomic Force Microscopes

Authors: Ning Li, Xue Zeng Zhao, Wei Jie Wang

Nano-Displacement Sensing and Estimation (nDSE): Enabling Technology for Nano Metrology and Fabrication

Authors: Jun Gao, Carl Picciotto

Nanometrology – Nanopositioning- and Nanomeasuring Machine with Integrated Nanopobes

Authors: Gerd Jäger, T. Hausotte, Eberhard Manske, H.-J. Büchner, R. Mastylo, N. Dorozhovets, R. Füßl, R. Grünwald

Signal Denoising of MEMS Microstructure Profile

Authors: Kai Hu, Xiang Qian Jiang, Xiao Jun Liu

Simulation of Light Scattering from Nanostructured Surfaces

Authors: Andreas Tausendfreund, S. Patzelt, S. Simon, G. Goch

The Assessment of Functional Properties of Surfaces with Morphological Operations

Authors: Michael Dietzsch, S. Gröger, M. Gerlach, Michael Paul Krystek