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Papers by Keyword: RBS/Channeling

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Low-Temperature Thermal Oxidation of Ion-Amorphized 6H-SiC

Authors: Roberta Nipoti, Andrea Parisini, Antonella Poggi

1109

A Comparative Study of High-Temperature Aluminum Post-Implantation Annealing in 6H- and 4H-SiC, Non-Uniform Temperature Effects

Authors: Mihai Lazar, Christophe Raynaud, Dominique Planson, Marie Laure Locatelli, K. Isoird, Laurent Ottaviani, Jean-Pierre Chante, Roberta Nipoti, Antonella Poggi, G.C. Cardinali

827

Improved Annealing Process for 6H-SiC p⁺-n Junction Creation by Al Implantation

Authors: Mihai Lazar, Laurent Ottaviani, Marie Laure Locatelli, Dominique Planson, B. Canut, Jean-Pierre Chante

921

Analysis of Dislocation Densities and Nanopipe Formation in MBE-grown AlN-Layers

Authors: D.G. Ebling, L. Kirste, M. Rattunde, J. Portmann, R. Brenn, K.W. Benz, K. Tillmann

1549

The Characterization of SiC Hot-Implanted with Ga ⁺

Authors: Yasuhito Tanaka, Naoto Kobayashi, Mitsuru Hasegawa, Sadafumi Yoshida, Yuuki Ishida, T. Nishijima, N. Hayashi

713

Post-Implantation Annealing of Aluminium in 6H-SiC

Authors: Laurent Ottaviani, Dominique Planson, Marie Laure Locatelli, Jean-Pierre Chante, B. Canut, S. Ramos

709

Site Identification of 6H-SiC Using RBS/Channeling Technique

Authors: Masataka Satoh, Katsutomo Okamoto, Y. Iwata, K. Kuriyama, M. Kanaya, Noboru Ohtani

441

Radiation Damage and Amorphization Mechanisms in Xe⁺ Irradiated CuInSe₂ Single Crystals

Authors: M.V. Yakushev, I.S. Tashlykov, R.D. Tomlinson, A.E. Hill, R.D. Pilkington

171