Depth Control Method of AFM-Based Nanomachining with Diamond Tip in Deflection Mode

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The equations correlated the normal load and the tip penetration depth were derived through the theoretical analysis of the penetration process of the diamond tip. Verified by experiments, the equations can reflect the penetration process of the scratching machining system and provide theoretical basis for the optimization of depth control algorithm. The control of scratching depth realized in AFM deflection mode can effectively restrain the system drift during scratching process.

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Periodical:

Edited by:

Kai Cheng, Yingxue Yao and Liang Zhou

Pages:

578-582

Citation:

Z. J. Hu et al., "Depth Control Method of AFM-Based Nanomachining with Diamond Tip in Deflection Mode", Applied Mechanics and Materials, Vols. 10-12, pp. 578-582, 2008

Online since:

December 2007

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$38.00

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