Development of Surface Image Scanning Device Measurement Head Mechanism Based on AFM

L. Zhou; H.B. Zhang; Qiang Liu

doi:10.4028/www.scientific.net/AMM.10-12.828

Paper Titles

Model Research on Special Metal Cutting NC Machine Tool
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On-Line Error Measurement Based on CCD in Quick-Point Grinding of Curve Parts
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Study of Knowledge-Based Engineering (KBE) Technology for the Cutting of Large Containers
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Research on Material Removal Algorithm Model in Virtual Milling Process Based on Adaptive Dynamic Quadtrees Algorithm
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Development of Surface Image Scanning Device Measurement Head Mechanism Based on AFM
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Adaptive Quadrangular Segmentation of Triangle Meshes
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Research on Product Development Process Management for Virtual Enterprise
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Predictive Modeling and Optimization of High Performance Machining
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Path Optimization for EDM of Rimed Turbine Blisks
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 10-12Development of Surface Image Scanning Device...

Development of Surface Image Scanning Device Measurement Head Mechanism Based on AFM

Abstract:

For the measurement of ultra smooth surface topography, a surface image scanning device measurement head mechanism based on the principle of atomic force microscope (AFM) was designed. It uses coarse adjustment, semi-delicate adjustment, delicate adjustment triple-stage adjustment mechanism, and tests the atomic force between the sample and the probe by using laser generator, position sensitive detector (PSD), cantilever and probe. This mechanism has high setting accuracy and resetting accuracy, combined with two-dimension movable table, can scan the surface topography of samples.