Development of Surface Image Scanning Device Measurement Head Mechanism Based on AFM

Abstract:

Article Preview

For the measurement of ultra smooth surface topography, a surface image scanning device measurement head mechanism based on the principle of atomic force microscope (AFM) was designed. It uses coarse adjustment, semi-delicate adjustment, delicate adjustment triple-stage adjustment mechanism, and tests the atomic force between the sample and the probe by using laser generator, position sensitive detector (PSD), cantilever and probe. This mechanism has high setting accuracy and resetting accuracy, combined with two-dimension movable table, can scan the surface topography of samples.

Info:

Periodical:

Edited by:

Kai Cheng, Yingxue Yao and Liang Zhou

Pages:

828-832

DOI:

10.4028/www.scientific.net/AMM.10-12.828

Citation:

L. Zhou et al., "Development of Surface Image Scanning Device Measurement Head Mechanism Based on AFM", Applied Mechanics and Materials, Vols. 10-12, pp. 828-832, 2008

Online since:

December 2007

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.