Recently, the demands for superfinishing machines have increased, but the development of superfinishing devices and superfinishing technology remain insufficient. And titanium, with its infinite potential, is widely known as a highly ideal material. It is therefore used in various industries that require precision-machined parts, such as the automobile, chemistry and aerospace industries, due to its outstanding specific strength and corrosion resistance compared to any other alloys. In this study, a series of experiments was performed to determine the mirror surface finishing conditions of titanium as well as efficient superfinishing conditions that can be utilized practically and economically at production sites. The applied conditions were the workpiece rotation speed, the oscillation speed, the contact pressure, the roller hardness and the type of abrasive film used when superfinishing was performed using an abrasive film for titanium-based materials such as pure titanium and titanium alloy. From the experiments, it was confirmed that efficient superfinishing conditions and mirror surface finishing conditions were determined for pure titanium and titanium alloy.