Modeling and Simulation of Controlled Manipulation by AFM Nano Robot

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In this article a model to describe relation between AFM cantilever’s deformation and force (as a force transducer) is developed. Furthermore a state space model is used to find suitable feedback control. A model which relates force and deformation is described. To verify a Finite element simulation is applied and a control algorithm for manipulation purpose is found. Moreover based on nature of the process control system is designed. Due to recent developments in AFM nanorobot applications in biotechnology and manufacturing nanostructures, understanding of cantilever’s response and process control have received great importance.

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3688-3695

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October 2011

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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