There is increasing demand for developing smart structures in various electronic and electromechanical systems during past two decades. The modeling analyzing and manufacturing of these small-scale components remained always a challenging job. Finite element capability available in commercial software package ANSYS makes it convenient to perform modeling and analyzing of these smart structures. In this study a 3-D finite element analysis for cantilever plate structure excited by patches of piezoelectric actuator is presented. To investigate the influence of actuator location and configuration of piezoelectric actuators attached to the plate structure in order to identify the optimal configuration of the actuators for selective excitation of the mode shapes of the cantilever plate structure. The finite element modeling based on ANSYS package using modal analysis and harmonic analysis is used in this study for cantilever plate structure excited by patch type of piezoelectric actuators of PZT-5A at different locations of same geometrical parameters on the cantilever beam. The results clearly indicate optimal locations and configuration of the piezoelectric actuator patches for achieving the excitation of plate modes. Consequently, the results indicate that effective active damping of structural vibration of the cantilever plate can be achieved by proper positioning of the piezoelectric actuator patches.