Preparation and Contrast of Transparent Conductive TiO2/Ag/ZnS Film by Magnetron Sputtering and Evaporation Coating Deposition

Hai Feng Chen; Jian Hua Zhu; Long Jie Chen; Miao Gen Qian

doi:10.4028/www.scientific.net/AMM.117-119.1152

Paper Titles

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Modeling and Prediction of Creep Behavior of Polypropylene Packaging Belt
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 117-119Preparation and Contrast of Transparent Conductive...

Preparation and Contrast of Transparent Conductive TiO₂/Ag/ZnS Film by Magnetron Sputtering and Evaporation Coating Deposition

Abstract:

In this paper, TiO₂/Ag/TiO₂ and TiO₂/Ag/ZnS films were prepared by evaporation coating (EC) and magnetron sputtering (MS). To test the resistance and light transmission rate to characterize the coating effect, both the size of indirect resistance that the relative thickness of the situation. By comparing the single magnetron sputtering and evaporation coating fabricated by the two transparent conductive oxide films (TCO) material conductivity and light transmission properties, determine a reasonable process. Firstly, the first layer is TiO₂ film by magnetron sputtering, and then coating Ag film and ZnS film plated by evaporation, the final form of TiO₂/Ag/ZnS film, which ha_{Subscript text}d much higher transmittance than TiO₂/Ag/TiO₂ at the same resistanc_{Subscript text}e.

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Periodical:

Applied Mechanics and Materials (Volumes 117-119)

Pages:

1152-1155

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.117-119.1152

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Online since:

October 2011

Authors:

Hai Feng Chen, Jian Hua Zhu, Long Jie Chen, Miao Gen Qian

Keywords:

Evaporation Coating, Magnetron Sputtering, Resistance, Transmittance

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