Preparation and Contrast of Transparent Conductive TiO2/Ag/ZnS Film by Magnetron Sputtering and Evaporation Coating Deposition
In this paper, TiO2/Ag/TiO2 and TiO2/Ag/ZnS films were prepared by evaporation coating (EC) and magnetron sputtering (MS). To test the resistance and light transmission rate to characterize the coating effect, both the size of indirect resistance that the relative thickness of the situation. By comparing the single magnetron sputtering and evaporation coating fabricated by the two transparent conductive oxide films (TCO) material conductivity and light transmission properties, determine a reasonable process. Firstly, the first layer is TiO2 film by magnetron sputtering, and then coating Ag film and ZnS film plated by evaporation, the final form of TiO2/Ag/ZnS film, which haSubscript textd much higher transmittance than TiO2/Ag/TiO2 at the same resistancSubscript texte.
Huixuan Zhang, Ye Han, Fuxiao Chen and Jiuba Wen
H. F. Chen et al., "Preparation and Contrast of Transparent Conductive TiO2/Ag/ZnS Film by Magnetron Sputtering and Evaporation Coating Deposition", Applied Mechanics and Materials, Vols. 117-119, pp. 1152-1155, 2012