Simulation of Micro-Bolometer Using Double Sacrificial Layers Structure

Qi Xia Jian; Jun Wang; Kai Yuan; Zi Qiu Peng; Ya Dong Jiang

doi:10.4028/www.scientific.net/AMM.120.504

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 120Simulation of Micro-Bolometer Using Double...

Simulation of Micro-Bolometer Using Double Sacrificial Layers Structure

Abstract:

Micro-bolometer using double sacrificial layers with smaller pixel size and higher resolution has been a new trend for microbolometers. Optical design and simulation of microbolometer with double sacrificial layers were analyzed in this article. Also, the manufacture, test and optimization of doule layer structure were discussed. The micro-bolometer cell structure models were constructed and simulated with Intellisuite software. The devices with and without umbrella structure were compared in this paper. The models of different structure and manufacture conditions were simulated with Intellisuite, such as the thickness of micro-bridge, the width of legs and the residual stress of thin films.

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Periodical:

Applied Mechanics and Materials (Volume 120)

Pages:

504-509

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.120.504

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Online since:

October 2011

Authors:

Qi Xia Jian, Jun Wang, Kai Yuan, Zi Qiu Peng, Ya Dong Jiang

Keywords:

Double Sacrificial Layers, Microbolometer, Micro-Electromechanical System (MEMS), Umbrella Structure

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