Effect of Catalytic Time Variation on Silica Antireﬂective Coatings

Rui Min Jin; Zhi Duan Cai; Li Min Cang; Tao Yan; Xiang Ju Han

doi:10.4028/www.scientific.net/AMM.121-126.80

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 121-126Effect of Catalytic Time Variation on Silica...

Effect of Catalytic Time Variation on Silica Antireﬂective Coatings

Abstract:

Based on TEOS system and sol-gel process, together with catalysts, the microstructure of SiO2 particles in the sol is exactly controlled. The films are characterized by ellipsometer and SEM respectively. The experimental results show that adjusting catalytic time can effectively effect the uniformly porous structures of SiO2 thin film on the glass substrate.

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Periodical:

Applied Mechanics and Materials (Volumes 121-126)

Pages:

80-84

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.121-126.80

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Online since:

October 2011

Authors:

Rui Min Jin, Zhi Duan Cai, Li Min Cang, Tao Yan, Xiang Ju Han

Keywords:

Antireﬂective Coating, Catalytic Time, Sol-Gel (SG), Tetraethyl-Orthosilicate

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References

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