Effect of Catalytic Time Variation on Silica Antireflective Coatings

Abstract:

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Based on TEOS system and sol-gel process, together with catalysts, the microstructure of SiO2 particles in the sol is exactly controlled. The films are characterized by ellipsometer and SEM respectively. The experimental results show that adjusting catalytic time can effectively effect the uniformly porous structures of SiO2 thin film on the glass substrate.

Info:

Periodical:

Edited by:

Dongye Sun, Wen-Pei Sung and Ran Chen

Pages:

80-84

DOI:

10.4028/www.scientific.net/AMM.121-126.80

Citation:

R. M. Jin et al., "Effect of Catalytic Time Variation on Silica Antireflective Coatings", Applied Mechanics and Materials, Vols. 121-126, pp. 80-84, 2012

Online since:

October 2011

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Price:

$35.00

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