Effect of Catalytic Time Variation on Silica Antireﬂective Coatings
Based on TEOS system and sol-gel process, together with catalysts, the microstructure of SiO2 particles in the sol is exactly controlled. The films are characterized by ellipsometer and SEM respectively. The experimental results show that adjusting catalytic time can effectively effect the uniformly porous structures of SiO2 thin film on the glass substrate.
Dongye Sun, Wen-Pei Sung and Ran Chen
R. M. Jin et al., "Effect of Catalytic Time Variation on Silica Antireﬂective Coatings", Applied Mechanics and Materials, Vols. 121-126, pp. 80-84, 2012