Preparation of Submicron Electrode for Electrochemical Micromachining by Multi-Step Electrochemical Etching

Yong Liu; Lin Sen Zhu

doi:10.4028/www.scientific.net/AMM.130-134.1250

Paper Titles

Contact Stress Analysis of Multilayered Strands
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Dynamic Response Analysis of Cantilever Beam under Moving Mass by Time-Discontinuous Galerkin Finite Element Method
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Research on Initial Allocation and Fairness of Carbon Trading
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Analysis of Dispersion Characteristic of Microstrip Lines on Ferrite and Silicon Structures with Spectral-Domain Method
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Preparation of Submicron Electrode for Electrochemical Micromachining by Multi-Step Electrochemical Etching
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Study on the Preparation of Dy-Doped TiO₂Nanotube Arrays and its Visible Light Responsive Photocatalytic Properties
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Nanometer Titanium Dioxide Powder Preparation and its Performance
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Experimental Research on Buckling of Nano-Thin Film under Impact Load
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Preparation of AlNPs/CMCN Composite Nanofibers by Electrospinning
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 130-134Preparation of Submicron Electrode for...

Preparation of Submicron Electrode for Electrochemical Micromachining by Multi-Step Electrochemical Etching

Abstract:

Electrochemical etching is an appropriate method for fabricating micro electrodes. We present a simple, fast, and cost-effective process for producing submicron electrode using multi-step electrochemical etching. In the study, we describe the single-step and multi-step electrochemical etching processes, respectively. In the single-step process, with machining time increasing, the intersection between micro electrode and electrolyte level will corrode off first, which could terminate the etching process. So, on the basis of the single-step process, we experimentally discussed the multi-step electrochemical etching process for the submicron electrode fabrication. Finally, the submicron electrodes were used in the electrochemical micromachining.