OCDs Reliability Screening Using Normalization Variance of Noise Spectrum

Abstract:

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Considering the inflexibility and limitations of the traditional frequency-domain OCDs reliability screening method using noise parameters at fixed frequency-points, we put forward a new method using the normalization variance of a large frequency-band noise spectrum in this paper. The possible sources of excess noise in OCDs and the relationship between low-frequency noise and reliability are studied at first, and then we describe the detailed process of the method for reliability screening, including the normalization method of noise spectrum, the calculations of variance and related characteristic quantities. At last, compare the screening results obtained by both of the previous method and this new method, and it demonstrated that this method is much more accurate and reliable.

Info:

Periodical:

Edited by:

Han Zhao

Pages:

72-75

DOI:

10.4028/www.scientific.net/AMM.130-134.72

Citation:

Q. Z. Zhou et al., "OCDs Reliability Screening Using Normalization Variance of Noise Spectrum", Applied Mechanics and Materials, Vols. 130-134, pp. 72-75, 2012

Online since:

October 2011

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Price:

$35.00

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