OCDs Reliability Screening Using Normalization Variance of Noise Spectrum

Article Preview

Abstract:

Considering the inflexibility and limitations of the traditional frequency-domain OCDs reliability screening method using noise parameters at fixed frequency-points, we put forward a new method using the normalization variance of a large frequency-band noise spectrum in this paper. The possible sources of excess noise in OCDs and the relationship between low-frequency noise and reliability are studied at first, and then we describe the detailed process of the method for reliability screening, including the normalization method of noise spectrum, the calculations of variance and related characteristic quantities. At last, compare the screening results obtained by both of the previous method and this new method, and it demonstrated that this method is much more accurate and reliable.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

72-75

Citation:

Online since:

October 2011

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2012 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] DAI Y, XU J. Solid-State Electronics, 44(8) (2000), pp.495-500.

Google Scholar

[2] WU D-E, ZHOU Q-Z, LIU P-P, et al. Journal of Bionic Engineering, 6(3) (2009), pp.306-310.

Google Scholar

[3] VANDAMME L K J, PERICHAUD M G, NOGUERA E, et al. Components and Packaging Technologies, IEEE Transactions on, 22(3) (1999), pp.446-454.

Google Scholar

[4] XU J, ABBOTT D, DAI Y. Microelectronics Reliability, 40(1) (2000), pp.171-180.

Google Scholar

[5] JONES B KIEE Proceedings - Circuits, Devices and Systems, 149(1) (2002), pp.13-22.

Google Scholar

[6] SLAIDIŅŠ I. Advanced Experimental Methods For Noise Research in Nanoscale Electronic Devices NATO Science Series, 151(III) (2005), p.271~278.

DOI: 10.1007/1-4020-2170-4_31

Google Scholar

[7] KLEINPENNING T G M. Physica B-C, 98(4) (1980), pp.289-299.

Google Scholar

[8] LI X, VANDAMME L K J. EDMS'94, (1994), pp.33-42.

Google Scholar

[9] WORCH P R, BILGER H R. Physica, 50(2) (1970), pp.161-176.

Google Scholar

[10] HU G, LI J, SHI Y, et al. Optics & Laser Technology, 39(1) (2007), pp.165-168.

Google Scholar

[11] HSU S T, WHITTIER R J. Solid-State Electronics, 12(11) (1969), pp.867-878.

Google Scholar