Finite Element Analysis of Four-Leg Capacitive Accelerometer

Shu Min Ma; Chao Chen; Tao Wang; Huan Zhang; Hong Xi Zhou

doi:10.4028/www.scientific.net/AMM.184-185.1562

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 184-185Finite Element Analysis of Four-Leg Capacitive...

Finite Element Analysis of Four-Leg Capacitive Accelerometer

Abstract:

MEMS are the manufacturing of a wide variety of items that are mechanical and electronic in nature. This paper describes a capacitive accelerometer technology using sense element structures. The sense element consists of a symmetrically flat plate of mass supported by four L shaped cantilevers, beams and frameworks. Capacitor plates located on the surface are used to detect the displacement. By using the finite element analysis method to build a model, analyzing the maximal displacement of mass, resonant frequency and stress of cantilever beam with different length, width and thickness.

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Periodical:

Applied Mechanics and Materials (Volumes 184-185)

Pages:

1562-1565

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.184-185.1562

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Online since:

June 2012

Authors:

Shu Min Ma, Chao Chen, Tao Wang, Huan Zhang, Hong Xi Zhou

Keywords:

Cantilever Beam, Capacitive Accelerometer, Finite Element Analysis (FEA), Stress

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References

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