Analysis of a Novel SAW Acceleration Sensor with Cantilever Beam Using ST-X Quartz

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In order to improve the signal-noise rate (SNR) of the acceleration sensor system, this article analysis of the design principles of a novel surface acoustic wave (SAW) acceleration sensor with cantilever beam using ST-X quartz. The main structure of the novel SAW acceleration sensor is composed of two oscillator, a mixer and a low pass filter to get the difference frequency structure, which can inhibit temperature drift and lateral acceleration impact. The two oscillator have the same structure, which is constitute of a low insertion loss SAW delay line and a feedback amplifier. This article shows the simulation results of the force analysis of the cantilever beam free end using ANSYS finite element analysis software. The novel acceleration sensor has potential applications in portable mobile devices or automotive airbags fields.

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285-289

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July 2012

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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[1] J. Shao, J. Liu, X. Qiao, Z. Jia, P. Wang, A New High Sensitivity Fiber Bragg Gratings Acceleration Sensor Based on Four Beams and a Ring, in: International Conference on Electric Information and Control Engineering (ICEICE), 2011, pp.5639-5641.

DOI: 10.1109/iceice.2011.5777655

Google Scholar

[2] M.S. Muller, T.C. Buck, A.W. Koch, Fiber Bragg Grating-based Acceleration Sensor, in: International Symposium on Optomechatronic Technologies, 2009, pp.127-132.

DOI: 10.1109/isot.2009.5326111

Google Scholar

[3] H. Wolfram, W. Dotzel, Stability Analysis of a MEMS Acceleration Sensor, in: International Conference on Applied Electronics, 2006, pp.233-236.

DOI: 10.1109/ae.2006.4383007

Google Scholar

[4] D. T. Tran, S. Roy, P. T. Nguyen, T. H. Huu, Streamlining the Design of MEMS Devices: An Acceleration Sensor, IEEE Circuits Syst. Mag. 8 (2008) 18-27.

DOI: 10.1109/mcas.2008.915506

Google Scholar

[5] H. Oh, S. S. Yang, K. Lee, Development of passive surface acoustic wave gyroscope with standing wave mode, in: IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS), 2011, pp.565-568.

DOI: 10.1109/memsys.2011.5734487

Google Scholar

[6] J. O. Guerra-Pulido, P. R. Pérez- alcázar, Relationship between acceleration and the scattering matrix in a SAW-MEMS accelerometer, IEEE Trans. Ultrason. Ferroelectr. Freq. Cont. 58 (2011) 1460-1467.

DOI: 10.1109/tuffc.2011.1965

Google Scholar

[7] S. Locke, B. K. Sinha, Acceleration Stress Compensated Surface Acoustic Wave Devices, IEEE Trans. Ultrason. Ferroelectr. Freq. Cont. 34 (1987) 478-484.

DOI: 10.1109/t-uffc.1987.26970

Google Scholar

[8] M. Thompson, D. C. Stone, Surface-Launched Acoustic Wave Sensors: Chemical Sensing and Thin-Film Characterization, John Wiley&Sons Inc, NewYork, (1997).

Google Scholar

[9] M. Hoummady, Acoustic wave sensors: design, sensing mechanisms and applications, Smart Mater. Struct. 6 (1997) 647-657.

DOI: 10.1088/0964-1726/6/6/001

Google Scholar