Research on Signal Demodulation Method of Silicon Micro-Machined Gyroscope

Abstract:

We report a silicon micro-machined gyroscope without the driven conformation. The output signal of the gyroscope contains the rolling, yawing, and pitching angular rates information. The principle of signal generation of the gyroscope is described with the equation, and the demodulation method of the gyroscope signals is illustrated by the experimental evidences. Toward the end, the key performances of the gyroscope are also presented.

• Periodical: Applied Mechanics and Materials (Volumes 20-23)
• Pages: 11-16
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.20-23.11
• Online since: January 2010
• Authors: Qing Wen Yan, Fu Xue Zhang, Li Feng Wu, Cheng Xiang Sun
• Keywords: Angular Rate, Signal Demodulation, Silicon Micro-Machined Gyroscope

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