The Research of Micromachined Gas Pendulum Accelerometer’s Structure

Abstract:

With the micromachining technology, two perpendicular cavities are formed on a silicon substrate, and two thermistors whose resistances are equal are placed parallel in each cavity. The nature convention of the gas is produced by the thermistors which are used as both the heater and the sensitive element in the hermetic cavity, and the acceleration can be measured with the temperature difference sensed by the thermistors. At last the test about the sensor shows when the value of acceleration is at the range of ±7g, the non-linearity is less than 0.62%FS.

• Periodical: Applied Mechanics and Materials (Volumes 20-23)
• Pages: 7-10
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.20-23.7
• Online since: January 2010
• Authors: Qi Feng Zhao, Fu Xue Zhang, Wei Zhang, Ping Yue
• Keywords: Accelerometer, Airflow, Micro Machine

References

[1] Zhang Fuxue: Nature Convection Gas Pendulum and Its Application in Accelerometer and Tilt Sensor . Progress in Natural Science. Vol. 15 (2005), pp.857-860.

DOI: 10.1080/10020070512331343030

[2] Zhang Fuxue: Gas Pendulum Accelerometer and Tilt Sensor . Proceeding of SPIE-The international society for optical engineering. V4414 (2001), 217-221.

[3] Zhang Fuxue: The Accelerometer and Tilt Sensor Based on Natural Convection Gas Pendulum . Proceedings of 2004 International Conference on Information Acquisition. IACA2004, p.122－ 125.

DOI: 10.1109/icia.2004.1373333