Design on High Vacuum System with Molecular Pump

Abstract:

This paper aimed at finishing a two-stage oil-free high-vacuum system using a molecular pump as the main pump and a rotary vane pump as the backing pump. Before the pump’s inlet, there is a molecular sieve. With the assistance of the high and low vacuum measuring instruments and other accessories, the system can achieve limiting vacuum of 5×10-5Pa in the vacuum chamber whose volume is 0.085m3 and provide the high vacuum needed for vacuum coating equipments whose magnitude is 100mm.

• Periodical: Applied Mechanics and Materials (Volumes 220-223)
• Pages: 459-462
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.220-223.459
• Online since: November 2012
• Authors: Chong Zhang, Jin Hua Zheng, Cong Hui Li, Yun Feng Chao, Long Jun Li, Ying Hua Wu
• Keywords: Selection and Calculation, Structural Design, Vacuum System

References

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