Effect of Deposited Angle on Structure and Surface Morphology of Fluorocarbon Films Deposited by Pulsed Plasma Thruster

Rui Zhang; Jian Jun Wu; Dai Xian Zhang; Fan Zhang; Zhen He

doi:10.4028/www.scientific.net/AMM.268-270.111

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 268-270Effect of Deposited Angle on Structure and Surface...

Effect of Deposited Angle on Structure and Surface Morphology of Fluorocarbon Films Deposited by Pulsed Plasma Thruster

Abstract:

A series of fluorocarbon films were deposited on glass substrates by Pulsed Plasma Thruster. The effects of deposited angle on chemical structure and surface morphology of these films were investigated using X-ray photoelectron spectroscopy (XPS) and scanning probe microscope (SPM). XPS data imply various carbon-related chemical components present on the surface of the deposited films are strongly impacted by the deposited angle. AFM measurements show that the increase in deposited angle can smoothen the surface morphology and decrease the RMS roughness. Changes in density of the neutral particle and flux of ions that reach the surface affect the formation of fluorocarbon clusters in the films and reduce surface roughness.

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Periodical:

Applied Mechanics and Materials (Volumes 268-270)

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111-114

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.268-270.111

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Online since:

December 2012

Authors:

Rui Zhang, Jian Jun Wu, Dai Xian Zhang, Fan Zhang, Zhen He

Keywords:

Fluorocarbon Film, Plume, Pulsed Plasma Thruster, SPM

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