Research on Micromechanical Machining Technology of Micro-Flow Sensor

Hui Lv; Shi Bin Liu

doi:10.4028/www.scientific.net/AMM.273.555

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 273Research on Micromechanical Machining Technology...

Research on Micromechanical Machining Technology of Micro-Flow Sensor

Abstract:

The development of micro-flow sensor is based on the employment of the technology of MEMS and micro-packaging application. The micro-flow sensor has many good performances, such as low cost, high sensitivity, and good stability, which make it show a prospect of wide range of research and applications. This paper briefly introduces some basic knowledge of the micro-flow sensor. Then we choose several typical micro-flow sensor and analyses their operating principle, structure, micromechanical machining technology, application and so on.

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Periodical:

Applied Mechanics and Materials (Volume 273)

Pages:

555-559

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.273.555

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Online since:

January 2013

Authors:

Hui Lv, Shi Bin Liu

Keywords:

Application, Micro-Flow Sensor, Micromechanical Machining Technology

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