Response of Ultra Precision Machine under Micro Environment Vibration

Abstract:

For the study of response of ultra-precision machine under environment vibration and its influences on machining precision, the numerical simulation method is adopted in this paper, the equipment modes are analyzed for the rationality of established model compared to the test results; and the frequency response of the machine excited by the measured ambient vibration acceleration power spectral shows that the table displacement reaches up to 0.396μm, exceeding the value allowed. Therefore, it’s significant to consider the micro environment vibration in ultra-precision processing.

• Periodical: Applied Mechanics and Materials (Volumes 275-277)
• Pages: 899-904
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.275-277.899
• Online since: January 2013
• Authors: Yan Ran He, Jin Fan
• Keywords: Environment Vibration, Frequency Domain Response, Modal Analysis, Ultra Precision Processing

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