Titanium-Doped Indium-Tin-Oxide Anti-Reflection Coating for Poly-Si Solar Cells

Abstract:

In this work, titanium-doped indium-tin-oxide (ITIO) films were deposited onto the glass substrates at room temperature by in-line RF magnetron sputtering. The deposition rate of the ITIO film increases with the RF power. The average transmittance of the deposited ITIO film is higher than 85% in the wavelength range of 350 - 950 nm. The resistivity of the sputtered ITIO has been reduced down to 7.03 × 10-4 Ω-cm. The poly-Si solar cell with ITIO film as the anti-reflection coating shows an efficiency improvement of 36.5% over that with AZO anti-reflection coating.

• Periodical: Applied Mechanics and Materials (Volumes 284-287)
• Pages: 250-254
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.284-287.250
• Online since: January 2013
• Authors: Jian Yang Lin, Shui Yang Lien, Heng Zih Liao, Chao Chun Wang, Asheesh Nautiyal, Yi Hsun Lin
• Keywords: Anti-Reflection Coating, Poly-Si Solar Cell, RF Magnetron Sputtering, Titanium-Doped Indium-Tin-Oxide

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