Effect of Acid Etching Durations on Surface Roughness and Residual Stresses of Lightweight Glass Ceramic

Chia Yen Chan; Yi Cheng Chen; Chii Rong Yang; Ting Ming Huang

doi:10.4028/www.scientific.net/AMM.284-287.77

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 284-287Effect of Acid Etching Durations on Surface...

Effect of Acid Etching Durations on Surface Roughness and Residual Stresses of Lightweight Glass Ceramic

Abstract:

The present study is aimed at investigating the effect of acid etching durations on the surface roughness and birefringence of lightweight mirrors made of ZERODUR® glass ceramic. Four acid etching durations (15, 20, 25 and 30 min) have been chosen at a fixed concentration. By using the photoelasticity, surface profiler and laser microscope, the results before and after acid etching have been obtained. It is found the maximum value of the retardation for the polished lightweight ZERODUR® mirror is up to 30 nm. In addition, residual stresses induced by the grinding process with an average grain size of 149 μm are relived after removing ZERODUR® material of a thickness of 60 μm.

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Periodical:

Applied Mechanics and Materials (Volumes 284-287)

Pages:

77-82

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.284-287.77

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Online since:

January 2013

Authors:

Chia Yen Chan, Yi Cheng Chen, Chii Rong Yang, Ting Ming Huang

Keywords:

Acid Etching, Light-Weighting, Residual Stress, Subsurface Roughness, ZERODUR^® Mirror

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