Novel Equivalent Circuit Model for Spiral Inductors on Lossy Silicon Substrate

Abstract:

Abstract. A fast and accurate equivalent circuit model for spiral inductors on lossy silicon substrate is presented and the parameters of the model are extracted without applying any fitting and optimized methods. In this model, the lateral resistance and inductance of substrate are introduced to model the eddy-current losses induced by magnetic coupling between the spiral and the substrate. FastHenry method is used to extract the inductances of spiral, substrate, and the mutual inductance between them. A numerical formulation is used to efficiently capture the proximity and skin effects in metal tracks. The proposed model is used to predict the performance of two typical spiral inductors fabricated in CMOS technology. The model shows excellent accuracy and efficiency by the comparison with measure results at the frequency from 100MHz to 10GHz.

• Periodical: Applied Mechanics and Materials (Volumes 300-301)
• Pages: 1003-1007
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.300-301.1003
• Online since: February 2013
• Authors: Juan Zou, Zhe Nan Tang
• Keywords: Circuit Model, FastHenry, Parameter Extract, Spiral Inductor

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