Sensitivity and Linearity Measuring of Micro-Gyroscope Based on Dynamic Analysis

Abstract:

The operating performance of micro-gyroscope may be easily influenced by various factors, which changes the dynamic response accordingly. Generally, the influences can’t be quantified because of the complexity, and the accurate sensitivity and linearity measuring of micro-gyroscope meets enormous difficulties. In order to accomplish corresponding measuring and analysis accurately and efficiently, input excitation waves are designed based on mathematical analysis of the measuring principles and vibration response, and each measuring of sensitivity and linearity can be analyzed in a single test. In this way, the influences from manual operation and variation of measuring environment are well eliminated, and some key parameters of the dynamic response are obtained, such as sensitive voltage, response function, linearity error, etc. In addition, problems about imbalance in double drive vibration, design of the minimum excitation voltage and evaluation of the measuring error are also described. Therefore, some important references are provided for subsequent design, experiment and engineering application.

• Periodical: Applied Mechanics and Materials (Volumes 300-301)
• Pages: 1175-1180
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.300-301.1175
• Online since: February 2013
• Authors: Hai Gang Sun, Yong Zhou
• Keywords: Dynamic Response, Linearity, Micro-Gyroscope, Sensitivity

References

[1] Wang Xiaodong, Yang Yang, Yu Dongsheng. Excitation Techniques for Testing of Dynamic Characteristics of MEMS Microstructure [J]. Journal of Test and Measurement Technology. 2008, 22(5): 377-387.

[2] Feng Yalin, Li Dachao, Jin Cuiyun. A MEMS testing system using computer microvision [J]. Micronanoelectronic Technology. 2003, 40(7): 221-234.

[3] Huang Sheng, Liu Minfei. Assessing on linearity of sensor [J]. Dam and Safety. 2006, (6): 39-43.

[4] Fan Shangchun, Wang Luda, Guo Zhanshe. Optimization of Sensitivity for a Novelly-Designed MEMS Resonant Gyroscope [J]. Journal of Astronautics. 2010, 31(10): 2340-2345.

[5] Zhang Guangming, Meng Guang, Zhou Jianbin. Nonlinear Dynamic Characteristics of Electrostatically Actuated MEMS Resonant Sensors under Parametric Excitation [J]. 2009, 30(1): 44-48.

DOI: 10.1109/jsen.2006.890158

[6] Zhou Yong, Sun Haigang. Videometrics-based Detection of Vibration Linearity in MEMS Gyroscope [J]. International Journal of Computational Intelligence Systems. 2011, 4(3): 321-328.

DOI: 10.1080/18756891.2011.9727789

[7] Yang Fujun, Sun Wei, Jiang Ming. Digital Image Correlation and High-speed Imaging Methods for Dynamic Micro-gyroscope Characterization Measurement [J]. Acta Metrologica Sinica. 2006, 27(4): 347-351.